Hans BUTLER

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Actuator assemblies comprising piezo actuators or electrostrictive...
- Patent number 12,210,294
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Hans Butler
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Imprint apparatus with movable stages
- Patent number 12,147,167
- Issue date Nov 19, 2024
- ASML Netherlands B.V.
- Junichi Kanehara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology apparatus
- Patent number 11,940,739
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Nitesh Pandey
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 11,914,308
- Issue date Feb 27, 2024
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object table, a stage apparatus and a lithographic apparatus
- Patent number 11,880,144
- Issue date Jan 23, 2024
- ASML Netherlands B.V.
- Sander Jeroen Hermanussen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Object positioning system diagnostic and calibration methods positi...
- Patent number 11,789,373
- Issue date Oct 17, 2023
- ASML Netherlands B.V.
- Bas Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 11,609,503
- Issue date Mar 21, 2023
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electronic system, accelerometer, calibration method, lithographic...
- Patent number 11,561,479
- Issue date Jan 24, 2023
- ASML Netherlands B.V.
- Hans Butler
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus and method
- Patent number 11,543,756
- Issue date Jan 3, 2023
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Height sensor, lithographic apparatus and method for manufacturing...
- Patent number 11,467,505
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Hans Butler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric actuator, actuator system, substrate support, and lit...
- Patent number 11,467,504
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Bas Jansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection apparatus stage positioning
- Patent number 11,302,512
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Marcel Koenraad Marie Baggen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Frame assembly, lithographic apparatus and device manufacturing method
- Patent number 11,269,262
- Issue date Mar 8, 2022
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology apparatus
- Patent number 11,262,661
- Issue date Mar 1, 2022
- ASML Netherlands B.V.
- Nitesh Pandey
- G01 - MEASURING TESTING
Information Patent Grant
Pneumatic support device and lithographic apparatus with pneumatic...
- Patent number 11,169,450
- Issue date Nov 9, 2021
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection system and mirror and radiation source for a lithographi...
- Patent number 11,150,560
- Issue date Oct 19, 2021
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G02 - OPTICS
Information Patent Grant
Bearing device, magnetic gravity compensator, vibration isolation s...
- Patent number 11,029,612
- Issue date Jun 8, 2021
- ASML Netherlands B.V.
- Maarten Hartger Kimman
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Lithographic apparatus
- Patent number 10,976,675
- Issue date Apr 13, 2021
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning device, lithographic apparatus, method for compensating...
- Patent number 10,962,890
- Issue date Mar 30, 2021
- ASML Netherlands B.V.
- Wilhelmus Franciscus Johannes Simons
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,962,891
- Issue date Mar 30, 2021
- ASML Netherlands B.V.
- Joeri Lof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, lithographic projection apparatus and devic...
- Patent number 10,955,761
- Issue date Mar 23, 2021
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support structure, method and lithographic apparatus
- Patent number 10,921,720
- Issue date Feb 16, 2021
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,866,529
- Issue date Dec 15, 2020
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration isolator, lithographic apparatus and device manufacturing...
- Patent number 10,816,910
- Issue date Oct 27, 2020
- ASML Netherlands B.V.
- Hans Butler
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,788,755
- Issue date Sep 29, 2020
- ASML Netherlands B.V.
- Joeri Lof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection system and mirror and radiation source for a lithographi...
- Patent number 10,732,511
- Issue date Aug 4, 2020
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,678,139
- Issue date Jun 9, 2020
- ASML Netherlands B.V.
- Joeri Lof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 10,663,872
- Issue date May 26, 2020
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,649,347
- Issue date May 12, 2020
- ASML Netherlands B.V.
- Michael Johannes Christiaan Ronde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus having an active base frame support
- Patent number 10,578,983
- Issue date Mar 3, 2020
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF REDUCING CYCLIC ERROR EFFECTS IN A LITHOGRAPHIC PROCESS,...
- Publication number 20250053102
- Publication date Feb 13, 2025
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imprint Apparatus with Movable Stages
- Publication number 20250028259
- Publication date Jan 23, 2025
- ASML NETHERLANDS B.V.
- Junichi KANEHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARAT...
- Publication number 20240313684
- Publication date Sep 19, 2024
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLATFORM FOR CHARGED PARTICLE APPARATUS AND COMPONENTS WITHIN A CHA...
- Publication number 20240312756
- Publication date Sep 19, 2024
- ASML NETHERLANDS B.V.
- Jasper Hendrik GRASMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metrology Apparatus
- Publication number 20240184218
- Publication date Jun 6, 2024
- ASML NETHERLANDS B.V.
- Nitesh PANDEY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A DRIVING FORCE ATT...
- Publication number 20240175479
- Publication date May 30, 2024
- ASML NETHERLANDS B.V.
- Maarten Hartger KIMMAN
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS
- Publication number 20240142885
- Publication date May 2, 2024
- ASML NETHERLANDS B.V.
- Sander Jeroen HERMANUSSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL FOCUS SOLUTON FOR SEM METROLOGY TOOLS
- Publication number 20240071713
- Publication date Feb 29, 2024
- ASML NETHERLANDS B.V.
- Niels Johannes Maria BOSCH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A METROLOGY APPARATUS AND A METROLOGY METHOD
- Publication number 20240061348
- Publication date Feb 22, 2024
- ASML NETHERLANDS B.V.
- Jeroen Arnoldus Leonardus Johannes RAAYMAKERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY TOOL WITH POSITION CONTROL OF PROJECTION SYSTEM
- Publication number 20230359127
- Publication date Nov 9, 2023
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20230266678
- Publication date Aug 24, 2023
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACTUATOR ASSEMBLIES COMPRISING PIEZO ACTUATORS OR ELECTROSTRICTIVE...
- Publication number 20220326627
- Publication date Oct 13, 2022
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AN OBJECT POSITIONING SYSTEM DIAGNOSTIC AND CALIBRATION METHODS POS...
- Publication number 20220197157
- Publication date Jun 23, 2022
- ASML NETHERLANDS B.V.
- Bas JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS
- Publication number 20220197155
- Publication date Jun 23, 2022
- ASML NETHERLANDS B.V.
- Sander Jeroen HERMANUSSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY APPARATUS
- Publication number 20220121127
- Publication date Apr 21, 2022
- ASML NETHERLANDS B.V.
- Nitesh PANDEY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRONIC SYSTEM, ACCELEROMETER, CALIBRATION METHOD, LITHOGRAPHIC...
- Publication number 20220113636
- Publication date Apr 14, 2022
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G01 - MEASURING TESTING
Information Patent Application
PIEZOELECTRIC ACTUATOR, ACTUATOR SYSTEM, SUBSTRATE SUPPORT, AND LIT...
- Publication number 20210318624
- Publication date Oct 14, 2021
- ASML NETHERLANDS B.V.
- Bas JANSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Frame Assembly, Lithographic Apparatus and Device Manufacturing Method
- Publication number 20210240090
- Publication date Aug 5, 2021
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20210223703
- Publication date Jul 22, 2021
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Method
- Publication number 20210132505
- Publication date May 6, 2021
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pneumatic Support Device and Lithographic Apparatus with Pneumatic...
- Publication number 20210080834
- Publication date Mar 18, 2021
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning Device, Lithographic Apparatus, Method for Compensating...
- Publication number 20200363732
- Publication date Nov 19, 2020
- ASML NETHERLANDS B.V.
- Wilhelmus Franciscus Johannes SIMONS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection System and Mirror and Radiation Source for a Lithographi...
- Publication number 20200285155
- Publication date Sep 10, 2020
- ASML NETHERLANDS B.V.
- Marcus Adrianus VAN DE KERKHOF
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20200225590
- Publication date Jul 16, 2020
- ASML NETHERLANDS B.V.
- Joeri LOF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus, Lithographic Projection Apparatus and Devic...
- Publication number 20200209757
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRON BEAM INSPECTION APPARATUS STAGE POSITIONING
- Publication number 20200203118
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Marcel Koenraad Marie BAGGEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20200159126
- Publication date May 21, 2020
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Support Structure, Method and Lithographic Apparatus
- Publication number 20200124991
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Hans Butler
- G02 - OPTICS
Information Patent Application
HEIGHT SENSOR, LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURING...
- Publication number 20200057390
- Publication date Feb 20, 2020
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROJECTION APPARATUS AND DEVIC...
- Publication number 20200050120
- Publication date Feb 13, 2020
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hans BUTLER

Person

Patents Grantslast 30 patents

Actuator assemblies comprising piezo actuators or electrostrictive...

Imprint apparatus with movable stages

Metrology apparatus

Lithographic apparatus

Object table, a stage apparatus and a lithographic apparatus

Object positioning system diagnostic and calibration methods positi...

Lithographic apparatus

Electronic system, accelerometer, calibration method, lithographic...

Lithographic apparatus and method

Height sensor, lithographic apparatus and method for manufacturing...

Piezoelectric actuator, actuator system, substrate support, and lit...

Electron beam inspection apparatus stage positioning

Frame assembly, lithographic apparatus and device manufacturing method

Metrology apparatus

Pneumatic support device and lithographic apparatus with pneumatic...

Projection system and mirror and radiation source for a lithographi...

Bearing device, magnetic gravity compensator, vibration isolation s...

Lithographic apparatus

Positioning device, lithographic apparatus, method for compensating...

Lithographic apparatus and device manufacturing method

Lithographic apparatus, lithographic projection apparatus and devic...

Support structure, method and lithographic apparatus

Lithographic apparatus and device manufacturing method

Vibration isolator, lithographic apparatus and device manufacturing...

Lithographic apparatus and device manufacturing method

Projection system and mirror and radiation source for a lithographi...

Lithographic apparatus and device manufacturing method

Lithographic apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus having an active base frame support

Patents Applicationslast 30 patents

METHOD OF REDUCING CYCLIC ERROR EFFECTS IN A LITHOGRAPHIC PROCESS,...

Imprint Apparatus with Movable Stages

ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARAT...

PLATFORM FOR CHARGED PARTICLE APPARATUS AND COMPONENTS WITHIN A CHA...

Metrology Apparatus

A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A DRIVING FORCE ATT...

OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS

DUAL FOCUS SOLUTON FOR SEM METROLOGY TOOLS

A METROLOGY APPARATUS AND A METROLOGY METHOD

METROLOGY TOOL WITH POSITION CONTROL OF PROJECTION SYSTEM

LITHOGRAPHIC APPARATUS

ACTUATOR ASSEMBLIES COMPRISING PIEZO ACTUATORS OR ELECTROSTRICTIVE...

AN OBJECT POSITIONING SYSTEM DIAGNOSTIC AND CALIBRATION METHODS POS...

OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS

METROLOGY APPARATUS

ELECTRONIC SYSTEM, ACCELEROMETER, CALIBRATION METHOD, LITHOGRAPHIC...

PIEZOELECTRIC ACTUATOR, ACTUATOR SYSTEM, SUBSTRATE SUPPORT, AND LIT...

Frame Assembly, Lithographic Apparatus and Device Manufacturing Method

LITHOGRAPHIC APPARATUS

Lithographic Apparatus and Method

Pneumatic Support Device and Lithographic Apparatus with Pneumatic...

Positioning Device, Lithographic Apparatus, Method for Compensating...

Projection System and Mirror and Radiation Source for a Lithographi...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic Apparatus, Lithographic Projection Apparatus and Devic...

ELECTRON BEAM INSPECTION APPARATUS STAGE POSITIONING

LITHOGRAPHIC APPARATUS

Support Structure, Method and Lithographic Apparatus

HEIGHT SENSOR, LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURING...

LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROJECTION APPARATUS AND DEVIC...