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Hans HIRSCHER
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Bad Ragaz, CH
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Patents Grants
last 30 patents
Information
Patent Grant
Magnetron atomization source and method of use thereof
Patent number
6,776,881
Issue date
Aug 17, 2004
Unaxis Balzers Aktiengesellschaft
Pius Gruenenfelder
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetron sputtering source and method of use thereof
Patent number
6,540,883
Issue date
Apr 1, 2003
Unaxis Balzers Aktiengesellschaft
Pius Gruenenfelder
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetron sputtering source and method of use thereof
Patent number
5,997,697
Issue date
Dec 7, 1999
Balzers Aktiengesellschaft
Pius Gruenenfelder
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetron atomization source and method of use thereof
Patent number
5,688,381
Issue date
Nov 18, 1997
Balzers Aktiengesellschaft
Pius Gruenenfelder
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece carrier with suction slot for a disk-shaped workpiece
Patent number
5,180,000
Issue date
Jan 19, 1993
Balzers Aktiengesellschaft
Rudolf Wagner
C30 - CRYSTAL GROWTH
Information
Patent Grant
Elevating table and transporting method
Patent number
5,051,054
Issue date
Sep 24, 1991
Balzers Aktiengesellschaft
Rudolf Wagner
C30 - CRYSTAL GROWTH
Information
Patent Grant
Workpiece carrier for a disk-shaped workpiece as well as a vacuum p...
Patent number
5,033,538
Issue date
Jul 23, 1991
Balzers Aktiengesellschaft
Rudolf Wagner
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method and apparatus for the transmission heat to or from plate lik...
Patent number
4,903,754
Issue date
Feb 27, 1990
Balzers Aktiengesellschaft
Hans Hirscher
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF SPUTTER DEPOSITION OF A FILM ON AN ESSENTIALLY PLANE EXTE...
Publication number
20170175255
Publication date
Jun 22, 2017
EVATEC ADVANCED TECHNOLOGIES AG
Oliver RATTUNDE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Magnetron atomization source and method of use thereof
Publication number
20030019740
Publication date
Jan 30, 2003
UNAXIS BALZERS AKTIENGESELLSCHAFT
Pius Gruenenfelder
H01 - BASIC ELECTRIC ELEMENTS