Hans J. Rutishauser

Follow

Person

Lexington, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of tuning electrostatic quadrupole electrodes of an ion beam...
- Patent number 6,774,378
- Issue date Aug 10, 2004
- Axcelis Technologies, Inc.
- Yongzhang Huang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Continuously variable aperture for high-energy ion implanter
- Patent number 6,207,964
- Issue date Mar 27, 2001
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for operating a variable aperture in an ion impla...
- Patent number 6,194,734
- Issue date Feb 27, 2001
- Axcelis Technologies, Inc.
- Paul A. Loomis
- H01 - BASIC ELECTRIC ELEMENTS