Hans Jansen

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,962,891
- Issue date Mar 30, 2021
- ASML Netherlands B.V.
- Joeri Lof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion liquid, exposure apparatus, and exposure process
- Patent number 10,712,675
- Issue date Jul 14, 2020
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,705,432
- Issue date Jul 7, 2020
- ASML Netherlands B.V.
- Aleksey Yurievich Kolesnychenko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 10,620,546
- Issue date Apr 14, 2020
- ASML Netherlands B.V.
- Jacobus Johannus Leonardus Hendricus Verspay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,509,326
- Issue date Dec 17, 2019
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,503,084
- Issue date Dec 10, 2019
- ASML Netherlands B.V.
- Joeri Lof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,488,759
- Issue date Nov 26, 2019
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,451,973
- Issue date Oct 22, 2019
- ASML Netherlands B.V.
- Bob Streefkerk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,444,644
- Issue date Oct 15, 2019
- ASML Netherlands B.V.
- Timotheus Franciscus Sengers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method of operating the apparatus
- Patent number 10,429,741
- Issue date Oct 1, 2019
- ASML Netherlands B.V.
- Jeroen Peter Johannes Bruijstens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source and lithographic apparatus
- Patent number 10,394,141
- Issue date Aug 27, 2019
- ASML Netherlands B.V.
- Michel Riepen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,345,712
- Issue date Jul 9, 2019
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 10,274,832
- Issue date Apr 30, 2019
- ASML Netherlands B.V.
- Jacobus Johannus Leonardus Hendricus Verspay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,234,768
- Issue date Mar 19, 2019
- ASML Netherlands B.V.
- Aleksey Yurievich Kolesnychenko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method of operating the apparatus
- Patent number 10,175,585
- Issue date Jan 8, 2019
- ASML Netherlands B.V.
- Robert Douglas Watso
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method of operating the apparatus
- Patent number 10,151,984
- Issue date Dec 11, 2018
- ASML Netherlands B.V.
- Jeroen Peter Johannes Bruijstens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,146,143
- Issue date Dec 4, 2018
- ASML Netherlands B.V.
- Timotheus Franciscus Sengers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,989,861
- Issue date Jun 5, 2018
- ASML Netherlands B.V.
- Aleksey Yurievich Kolesnychenko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 9,964,861
- Issue date May 8, 2018
- ASML Netherlands B.V.
- Jacobus Johannus Leonardus Hendricus Verspay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,952,515
- Issue date Apr 24, 2018
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,885,965
- Issue date Feb 6, 2018
- ASML Netherlands B.V.
- Christiaan Alexander Hoogendam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,829,799
- Issue date Nov 28, 2017
- ASML Netherlands B.V.
- Aleksey Yurievich Kolesnychenko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,804,509
- Issue date Oct 31, 2017
- ASML Netherlands B.V.
- Timotheus Franciscus Sengers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 9,798,247
- Issue date Oct 24, 2017
- ASML Netherlands B.V.
- Jacobus Johannus Leonardus Hendricus Verspay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and in-line cleaning apparatus
- Patent number 9,785,061
- Issue date Oct 10, 2017
- ASML Netherlands B.V.
- Roelof Frederik De Graaf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion liquid, exposure apparatus, and exposure process
- Patent number 9,772,565
- Issue date Sep 26, 2017
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source and lithographic apparatus
- Patent number 9,753,383
- Issue date Sep 5, 2017
- ASML Netherlands B.V.
- Michel Riepen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,703,210
- Issue date Jul 11, 2017
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,645,507
- Issue date May 9, 2017
- ASML Netherlands B.V.
- Jacobus Johannus Leonardus Hendricus Verspay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and contamination removal or prevention method
- Patent number 9,599,908
- Issue date Mar 21, 2017
- ASML Netherlands B.V.
- Anthonius Martinus Cornelis Petrus De Jong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20200225590
- Publication date Jul 16, 2020
- ASML NETHERLANDS B.V.
- Joeri LOF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190324374
- Publication date Oct 24, 2019
- ASML NETHERLANDS B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190302631
- Publication date Oct 3, 2019
- ASML NETHERLANDS B.V.
- Joeri LOF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20190258174
- Publication date Aug 22, 2019
- ASML NETHERLANDS B.V.
- Jacobus Johannus Leonardus Hendricus VERSPAY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190212662
- Publication date Jul 11, 2019
- ASML NETHERLANDS B.V.
- Aleksey Yurievich KOLESNYCHENKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
- Publication number 20190086814
- Publication date Mar 21, 2019
- ASML NETHERLANDS B.V.
- Jeroen Peter Johannes Bruijstens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190086820
- Publication date Mar 21, 2019
- ASML NETHERLANDS B.V.
- Timotheus Franciscus SENGERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOVLING A...
- Publication number 20180356735
- Publication date Dec 13, 2018
- ASML NETHERLANDS B.V.
- Jacobus Johannus Leonardus Hendricus VERSPAY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180246418
- Publication date Aug 30, 2018
- ASML NETHERLANDS B.V.
- Aleksey Yurievich KOLESNYCHENKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180203364
- Publication date Jul 19, 2018
- ASMLNETHERLANDS B.V.
- Bob STREEFKERK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180129143
- Publication date May 10, 2018
- ASML NETHERLANDS B.V.
- Christiaan Alexander HOOGENDAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180081282
- Publication date Mar 22, 2018
- ASML NETHERLANDS B.V.
- Aleksey Yurievich KOLESNYCHENKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20180046090
- Publication date Feb 15, 2018
- ASML NETHERLANDS B.V.
- Jacobus Johannus Leonardus Hendricus VERSPAY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180046095
- Publication date Feb 15, 2018
- ASML NETHERLANDS B.V.
- Timotheus Franciscus SENGERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION LIQUID, EXPOSURE APPARATUS, AND EXPOSURE PROCESS
- Publication number 20180004100
- Publication date Jan 4, 2018
- ASML NETHERLANDS B.V.
- Hans JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Radiation Source and Lithographic Apparatus
- Publication number 20170322499
- Publication date Nov 9, 2017
- ASML NETHERLANDS B.V.
- Michel RIEPEN
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170285488
- Publication date Oct 5, 2017
- ASML NETHERLANDS B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170242347
- Publication date Aug 24, 2017
- ASML NETHERLANDS B.V.
- Christiaan Alexander HOOGENDAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20170219938
- Publication date Aug 3, 2017
- ASML NETHERLANDS B.V.
- Jacobus Johannus Leonardus Hendricus VERSPAY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170212422
- Publication date Jul 27, 2017
- ASML NETHERLANDS B.V.
- Bob STREEFKERK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170176876
- Publication date Jun 22, 2017
- ASML NETHERLANDS B.V.
- Timotheus Franciscus SENGERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170153557
- Publication date Jun 1, 2017
- ASML NETHERLANDS B.V.
- Aleksey Yurievich KOLESNYCHENKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170139333
- Publication date May 18, 2017
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie DIERICHS
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170010545
- Publication date Jan 12, 2017
- ASML NETHERLANDS B.V.
- Joeri LOF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION LIQUID, EXPOSURE APPARATUS, AND EXPOSURE PROCESS
- Publication number 20160363873
- Publication date Dec 15, 2016
- ASML NETHERLANDS B.V.
- Hans JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS
- Publication number 20160342098
- Publication date Nov 24, 2016
- ASML NETHERLANDS B.V.
- Roelof Frederik DE GRAAF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20160274473
- Publication date Sep 22, 2016
- ASML NETHERLANDS B.V.
- Christiaan Alexander HOOGENDAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20160124321
- Publication date May 5, 2016
- ASML NETHERLANDS B.V.
- Jacobus Johannus Leonardus Hendricus VERSPAY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
- Publication number 20160124319
- Publication date May 5, 2016
- ASML NETHERLANDS B.V.
- Jeroen Peter Johannes Bruijstens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20160085161
- Publication date Mar 24, 2016
- ASML NETHERLANDS B.V.
- Aleksey Yurievich KOLESNYCHENKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hans Jansen

Person

Patents Grantslast 30 patents

Lithographic apparatus and device manufacturing method

Immersion liquid, exposure apparatus, and exposure process

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and a method of operating the apparatus

Radiation source and lithographic apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and a method of operating the apparatus

Lithographic apparatus and a method of operating the apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and in-line cleaning apparatus

Immersion liquid, exposure apparatus, and exposure process

Radiation source and lithographic apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and contamination removal or prevention method

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOVLING A...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION LIQUID, EXPOSURE APPARATUS, AND EXPOSURE PROCESS

Radiation Source and Lithographic Apparatus

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION LIQUID, EXPOSURE APPARATUS, AND EXPOSURE PROCESS

LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD