Hans-Jürgen Mann

Person

Oberkochen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for three-dimensionally measuring a 3D aerial image of a lit...
- Patent number 10,634,886
- Issue date Apr 28, 2020
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Grant
Imaging optical unit for a metrology system for examining a lithogr...
- Patent number 10,606,048
- Issue date Mar 31, 2020
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Grant
Magnifying imaging optical unit and EUV mask inspection system with...
- Patent number 10,408,765
- Issue date Sep 10, 2019
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G01 - MEASURING TESTING
Information Patent Grant
Method for three-dimensionally measuring a 3D aerial image of a lit...
- Patent number 10,068,325
- Issue date Sep 4, 2018
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optical system
- Patent number 10,007,187
- Issue date Jun 26, 2018
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflective optical element and EUV lithography appliance
- Patent number 9,910,193
- Issue date Mar 6, 2018
- Carl Zeiss SMT GmbH
- Johann Trenkler
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Catadioptric projection objective with parallel, offset optical axes
- Patent number 9,772,478
- Issue date Sep 26, 2017
- Carl Zeiss SMT GmbH
- David Shafer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective of a microlithographic projection exposure app...
- Patent number 9,720,329
- Issue date Aug 1, 2017
- Carl Zeiss SMT GmbH
- Hartmut Enkisch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optics and projection exposure installation for microlithog...
- Patent number 9,639,004
- Issue date May 2, 2017
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Anamorphically imaging projection lens system and related optical s...
- Patent number 9,568,832
- Issue date Feb 14, 2017
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror for use in a microlithography projection exposure apparatus
- Patent number 9,568,845
- Issue date Feb 14, 2017
- Carl Zeiss SMT GmbH
- Martin Rocktaeschel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optical system and projection exposure installation for mic...
- Patent number 9,541,841
- Issue date Jan 10, 2017
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optics, microlithography projection exposure apparatus havi...
- Patent number 9,535,337
- Issue date Jan 3, 2017
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithography projection exposure apparatus having at least two...
- Patent number 9,529,276
- Issue date Dec 27, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optical system and projection exposure installation for mic...
- Patent number 9,500,958
- Issue date Nov 22, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Magnifying imaging optical unit and metrology system including same
- Patent number 9,482,794
- Issue date Nov 1, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithography projection optical system, tool and method of prod...
- Patent number 9,482,961
- Issue date Nov 1, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catoptric objectives and systems using catoptric objectives
- Patent number 9,465,300
- Issue date Oct 11, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Imaging optical unit for a projection exposure apparatus
- Patent number 9,459,539
- Issue date Oct 4, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Imaging optics
- Patent number 9,442,386
- Issue date Sep 13, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Optical arrangement and microlithographic projection exposure appar...
- Patent number 9,436,101
- Issue date Sep 6, 2016
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- G02 - OPTICS
Information Patent Grant
Anamorphically imaging projection lens system and related optical s...
- Patent number 9,366,968
- Issue date Jun 14, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
EUV collector
- Patent number 9,316,918
- Issue date Apr 19, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective for microlithography
- Patent number 9,304,408
- Issue date Apr 5, 2016
- Carl Zeiss SMT GmbH
- Johannes Zellner
- G02 - OPTICS
Information Patent Grant
Catoptric objectives and systems using catoptric objectives
- Patent number 9,304,407
- Issue date Apr 5, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Imaging optical system
- Patent number 9,298,100
- Issue date Mar 29, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Imaging optical system and projection exposure system including the...
- Patent number 9,285,515
- Issue date Mar 15, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Imaging optical system
- Patent number 9,244,361
- Issue date Jan 26, 2016
- Carl Zeiss SMT GmbH
- Ralf Mueller
- G02 - OPTICS
Information Patent Grant
Projection optics for microlithography
- Patent number 9,239,521
- Issue date Jan 19, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Grant
Imaging optics
- Patent number 9,201,226
- Issue date Dec 1, 2015
- Carl Zeiss SMT GmbH
- Ulrich Loering
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
IMAGING OPTICAL SYSTEM
- Publication number 20190025710
- Publication date Jan 24, 2019
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...
- Publication number 20180357758
- Publication date Dec 13, 2018
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
REFLECTIVE OPTICAL ELEMENT AND EUV LITHOGRAPHY APPLIANCE
- Publication number 20180224585
- Publication date Aug 9, 2018
- Carl Zeiss SMT GMBH
- Johann TRENKLER
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY
- Publication number 20180164474
- Publication date Jun 14, 2018
- Carl Zeiss SMT GMBH
- Daniel Kraehmer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES
- Publication number 20180031815
- Publication date Feb 1, 2018
- Carl Zeiss SMT GMBH
- David Shafer
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL SYSTEM
- Publication number 20170146912
- Publication date May 25, 2017
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...
- Publication number 20170132782
- Publication date May 11, 2017
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING A LITHOGR...
- Publication number 20170131528
- Publication date May 11, 2017
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20160274343
- Publication date Sep 22, 2016
- Carl Zeiss SMT GMBH
- David R. Shafer
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL SYSTEM
- Publication number 20160259248
- Publication date Sep 8, 2016
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20160195817
- Publication date Jul 7, 2016
- Carl Zeiss SMT GMBH
- Hartmut Enkisch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE SYSTEM FOR MICROLITH...
- Publication number 20160004165
- Publication date Jan 7, 2016
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
MAGNIFYING IMAGING OPTICAL UNIT AND EUV MASK INSPECTION SYSTEM WITH...
- Publication number 20150362438
- Publication date Dec 17, 2015
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES
- Publication number 20150226948
- Publication date Aug 13, 2015
- Carl Zeiss SMT GMBH
- David Shafer
- G02 - OPTICS
Information Patent Application
IMAGING OPTICS, MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS HAVI...
- Publication number 20150219999
- Publication date Aug 6, 2015
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20150055214
- Publication date Feb 26, 2015
- Carl Zeiss SMT GMBH
- David R. Shafer
- G02 - OPTICS
Information Patent Application
REFLECTIVE OPTICAL ELEMENT AND EUV LITHOGRAPHY APPLIANCE
- Publication number 20150055111
- Publication date Feb 26, 2015
- Carl Zeiss SMT GMBH
- Johann Trenkler
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHY PROJECTION OPTICAL SYSTEM, TOOL AND METHOD OF PROD...
- Publication number 20150049319
- Publication date Feb 19, 2015
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHIC IMAGING OPTICAL SYSTEM INCLUDING MULTIPLE MIRRORS
- Publication number 20150022799
- Publication date Jan 22, 2015
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH TWO INTERMEDIATE IMAGES AND...
- Publication number 20140376086
- Publication date Dec 25, 2014
- David Shafer
- G02 - OPTICS
Information Patent Application
MAGNIFYING IMAGING OPTICAL UNIT AND METROLOGY SYSTEM INCLUDING SAME
- Publication number 20140362584
- Publication date Dec 11, 2014
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHY PROJECTION OPTICAL SYSTEM AND METHOD FOR MANUFACTU...
- Publication number 20140327898
- Publication date Nov 6, 2014
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL SYSTEM
- Publication number 20140320838
- Publication date Oct 30, 2014
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE SYSTEM INCLUDING THE...
- Publication number 20140132941
- Publication date May 15, 2014
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
PROJECTION OPTICS FOR MICROLITHOGRAPHY
- Publication number 20140118714
- Publication date May 1, 2014
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20140111787
- Publication date Apr 24, 2014
- David R. Shafer
- G02 - OPTICS
Information Patent Application
PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY
- Publication number 20140104588
- Publication date Apr 17, 2014
- Carl Zeiss SMT GMBH
- Johannes Zellner
- G02 - OPTICS
Information Patent Application
CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES
- Publication number 20140098355
- Publication date Apr 10, 2014
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE INSTALLATION FOR MIC...
- Publication number 20140078484
- Publication date Mar 20, 2014
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHY PROJECTION SYSTEM WITH AN ACCESSIBLE DIAPHRAGM OR...
- Publication number 20140071414
- Publication date Mar 13, 2014
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS

Hans-Jürgen Mann

Person

Patents Grantslast 30 patents

Method for three-dimensionally measuring a 3D aerial image of a lit...

Imaging optical unit for a metrology system for examining a lithogr...

Magnifying imaging optical unit and EUV mask inspection system with...

Method for three-dimensionally measuring a 3D aerial image of a lit...

Imaging optical system

Reflective optical element and EUV lithography appliance

Catadioptric projection objective with parallel, offset optical axes

Projection objective of a microlithographic projection exposure app...

Imaging optics and projection exposure installation for microlithog...

Anamorphically imaging projection lens system and related optical s...

Mirror for use in a microlithography projection exposure apparatus

Imaging optical system and projection exposure installation for mic...

Imaging optics, microlithography projection exposure apparatus havi...

Microlithography projection exposure apparatus having at least two...

Imaging optical system and projection exposure installation for mic...

Magnifying imaging optical unit and metrology system including same

Microlithography projection optical system, tool and method of prod...

Catoptric objectives and systems using catoptric objectives

Imaging optical unit for a projection exposure apparatus

Imaging optics

Optical arrangement and microlithographic projection exposure appar...

Anamorphically imaging projection lens system and related optical s...

EUV collector

Projection objective for microlithography

Catoptric objectives and systems using catoptric objectives

Imaging optical system

Imaging optical system and projection exposure system including the...

Imaging optical system

Projection optics for microlithography

Imaging optics

Patents Applicationslast 30 patents

IMAGING OPTICAL SYSTEM

METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...

REFLECTIVE OPTICAL ELEMENT AND EUV LITHOGRAPHY APPLIANCE

PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY

CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES

IMAGING OPTICAL SYSTEM

METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LIT...

IMAGING OPTICAL UNIT FOR A METROLOGY SYSTEM FOR EXAMINING A LITHOGR...

CATADIOPTRIC PROJECTION OBJECTIVE

IMAGING OPTICAL SYSTEM

PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE SYSTEM FOR MICROLITH...

MAGNIFYING IMAGING OPTICAL UNIT AND EUV MASK INSPECTION SYSTEM WITH...

CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES

IMAGING OPTICS, MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS HAVI...

CATADIOPTRIC PROJECTION OBJECTIVE

REFLECTIVE OPTICAL ELEMENT AND EUV LITHOGRAPHY APPLIANCE

MICROLITHOGRAPHY PROJECTION OPTICAL SYSTEM, TOOL AND METHOD OF PROD...

MICROLITHOGRAPHIC IMAGING OPTICAL SYSTEM INCLUDING MULTIPLE MIRRORS

CATADIOPTRIC PROJECTION OBJECTIVE WITH TWO INTERMEDIATE IMAGES AND...

MAGNIFYING IMAGING OPTICAL UNIT AND METROLOGY SYSTEM INCLUDING SAME

MICROLITHOGRAPHY PROJECTION OPTICAL SYSTEM AND METHOD FOR MANUFACTU...

IMAGING OPTICAL SYSTEM

IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE SYSTEM INCLUDING THE...

PROJECTION OPTICS FOR MICROLITHOGRAPHY

CATADIOPTRIC PROJECTION OBJECTIVE

PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY

CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES

IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE INSTALLATION FOR MIC...

MICROLITHOGRAPHY PROJECTION SYSTEM WITH AN ACCESSIBLE DIAPHRAGM OR...