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Hans-Juergen Brueck
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Munich, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for an automatic optical measuring of an OPC structure
Patent number
7,460,962
Issue date
Dec 2, 2008
Muetec Automatisierte Mikroskopie und Messtecknik GmbH
Hans-Juergen Brueck
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for measuring feature widths on masks for the semiconduct...
Patent number
7,375,792
Issue date
May 20, 2008
Leica Microsystems Semiconductor GmbH
Wolfgang Vollrath
G01 - MEASURING TESTING
Information
Patent Grant
Method of correcting physically-conditioned errors in measurement o...
Patent number
6,795,574
Issue date
Sep 21, 2004
Applied Integrated Systems & Software
Hans Hartmann
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Method and device for inspecting a disk-shaped object
Publication number
20090316981
Publication date
Dec 24, 2009
Vistec Semiconductor Systems GmbH
Hans-Juergen Brueck
G01 - MEASURING TESTING
Information
Patent Application
Device for Inspecting a Microscopic Component
Publication number
20080259327
Publication date
Oct 23, 2008
Vistec Semiconductor Systems GmbH
Hans-Juergen Brueck
G02 - OPTICS
Information
Patent Application
Method for an automatic optical measuring of an OPC structure
Publication number
20080071479
Publication date
Mar 20, 2008
Hans-Juergen Brueck
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE FOR INSPECTING A MICROSCOPIC COMPONENT BY MEANS OF AN IMMERS...
Publication number
20070206279
Publication date
Sep 6, 2007
Vistec Semiconductor Systems GmbH
Hans-Juergen Brueck
G02 - OPTICS
Information
Patent Application
APPARATUS FOR MEASURING FEATURE WIDTHS ON MASKS FOR THE SEMICONDUCT...
Publication number
20050084770
Publication date
Apr 21, 2005
Leica Microsystems Semiconductor GmbH
Wolfgang Vollrath
G02 - OPTICS