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Hans-Juergen Scherle
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Aalen, DE
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Patents Grants
last 30 patents
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Patent Grant
Optical element unit for exposure processes having sealing element
Patent number
9,046,795
Issue date
Jun 2, 2015
Carl Zeiss SMT GmbH
Tilman Schwertner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflecting optical element with eccentric optical passageway
Patent number
7,760,327
Issue date
Jul 20, 2010
Carl Zeiss SMT AG
Hans-Jürgen Scherle
G02 - OPTICS
Information
Patent Grant
Optical element unit for exposure processes
Patent number
7,545,483
Issue date
Jun 9, 2009
Carl Zeiss SMT AG
Bernhard Gellrich
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES
Publication number
20150168846
Publication date
Jun 18, 2015
Carl Zeiss SMT GMBH
Tilman Schwertner
G02 - OPTICS
Information
Patent Application
OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES
Publication number
20080225247
Publication date
Sep 18, 2008
Carl Zeiss SMT AG
Tilman Schwertner
G02 - OPTICS
Information
Patent Application
Optical element unit for exposure processes
Publication number
20080192215
Publication date
Aug 14, 2008
Carl Zeiss SMT AG
Bernhard Gellrich
G02 - OPTICS
Information
Patent Application
Reflecting optical element with eccentric optical passageway
Publication number
20060262704
Publication date
Nov 23, 2006
Carl Zeiss SMT AG
Hans-Jurgen Scherle
G02 - OPTICS