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Vienna, AT
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Patents Grants
last 30 patents
Information
Patent Grant
Pattern definition device with multiple multibeam array
Patent number
8,546,767
Issue date
Oct 1, 2013
IMS Nanofabrication AG
Elmar Platzgummer
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Ion irradiation of a target at very high and very low kinetic ion e...
Patent number
6,909,103
Issue date
Jun 21, 2005
IMS-Ionen Mikrofabrikations Systeme GmbH
Elmar Platzgummer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Maskless particle-beam system for exposing a pattern on a substrate
Patent number
6,768,125
Issue date
Jul 27, 2004
IMS Nanofabrication, GmbH
Elmar Platzgummer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle-optical imaging system for lithography purposes
Patent number
6,326,632
Issue date
Dec 4, 2001
IMS-Ionen Mikrofabrikations Systeme GmbH
Herbert Buschbeck
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Arrangement for shadow-casting lithography
Patent number
5,874,739
Issue date
Feb 23, 1999
Ims-Ionen Mikrofabrikations Systems BMGH
Herbert Buschbeck
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Arrangement for masked beam lithography by means of electrically ch...
Patent number
5,742,062
Issue date
Apr 21, 1998
IMS Mikrofabrikations Systeme GmbH
Gerhard Stengl
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
PATTERN DEFINITION DEVICE WITH MULTIPLE MULTIBEAM ARRAY
Publication number
20110204253
Publication date
Aug 25, 2011
Elmar Platzgummer
B82 - NANO-TECHNOLOGY
Information
Patent Application
Ion irradiation of a target at very high and very low kinetic ion e...
Publication number
20050012052
Publication date
Jan 20, 2005
IMS-Ionen Mikrofabrikations Systeme GmbH
Elmar Platzgummer
B82 - NANO-TECHNOLOGY
Information
Patent Application
Maskless particle-beam system for exposing a pattern on a substrate
Publication number
20030155534
Publication date
Aug 21, 2003
Elmar Platzgummer
B82 - NANO-TECHNOLOGY