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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and method
Patent number
7,522,263
Issue date
Apr 21, 2009
ASML Netherlands B.V.
Hubert Adriaan Van Mierlo
G01 - MEASURING TESTING
Information
Patent Grant
Device manufacturing method, device manufactured thereby and a mask...
Patent number
7,492,443
Issue date
Feb 17, 2009
ASML Netherlands B.V.
Jan Evert Van Der Werf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and patterning device transport
Patent number
7,248,340
Issue date
Jul 24, 2007
ASML Netherlands B.V.
Erik Leonardus Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and patterning device transport
Patent number
7,151,589
Issue date
Dec 19, 2006
ASML Netherlands B.V.
Erik Leonardus Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method and...
Patent number
7,115,886
Issue date
Oct 3, 2006
ASML Netherlands B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and device manu...
Patent number
7,095,479
Issue date
Aug 22, 2006
ASML Netherlands B.V.
Lucas Henricus Johannes Stevens
B08 - CLEANING
Information
Patent Grant
Device manufacturing method, device manufactured thereby and a mask...
Patent number
6,879,374
Issue date
Apr 12, 2005
ASML Netherlands B.V.
Jan Evert Van Der Werf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method and...
Patent number
6,828,569
Issue date
Dec 7, 2004
ASML Netherlands B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask handling apparatus, lithographic projection apparatus, device...
Patent number
6,781,673
Issue date
Aug 24, 2004
ASML Netherlands B.V.
Johannes Hubertus Josephina Moors
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method, dev...
Patent number
6,724,460
Issue date
Apr 20, 2004
ASML Netherlands B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic apparatus and method
Publication number
20070146658
Publication date
Jun 28, 2007
ASML NETHERLANDS B.V.
Hubert Adriaan Van Mierlo
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus and method
Publication number
20070146657
Publication date
Jun 28, 2007
ASML NETHERLANDS B.V.
Hubert Adriaan Van Mierlo
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus and patterning device transport
Publication number
20050286029
Publication date
Dec 29, 2005
ASML NETHERLANDS B.V.
Erik Leonardus Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and patterning device transport
Publication number
20050286041
Publication date
Dec 29, 2005
ASML NETHERLANDS B.V.
Erik Leonardus Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device manufacturing method, device manufactured thereby and a mask...
Publication number
20050146703
Publication date
Jul 7, 2005
ASML NETHERLANDS B.V.
Jan Evert Van Der Werf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus, device manufacturing method and...
Publication number
20050112508
Publication date
May 26, 2005
ASML NETHERLANDS B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method and device manu...
Publication number
20050057734
Publication date
Mar 17, 2005
ASML NETHERLANDS B.V.
Lucas Henricus Johannes Stevens
B08 - CLEANING
Information
Patent Application
Method and device for measuring contamination of a surface of a com...
Publication number
20040227102
Publication date
Nov 18, 2004
ASML NETHERLANDS B.V.
Ralph Kurt
G01 - MEASURING TESTING
Information
Patent Application
Lithographic projection apparatus, device manufacturing method and...
Publication number
20030096193
Publication date
May 22, 2003
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus, device manufacturing method, dev...
Publication number
20030095240
Publication date
May 22, 2003
ASM LITHOGRAPHY B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device manufacturing method, device manufactured thereby and a mask...
Publication number
20030003383
Publication date
Jan 2, 2003
ASML NETHERLANDS B.V.
Jan Evert Van Der Werf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask handling apparatus, lithographic projection apparatus, device...
Publication number
20020109828
Publication date
Aug 15, 2002
Johannes Hubertus Josephina Moors
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask handling apparatus, lithographic projection apparatus, device...
Publication number
20020096647
Publication date
Jul 25, 2002
ASM LITHOGRAPHY B.V.
Johannes Hubertus Josephina Moors
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY