Hans Michael Solowan

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for the simulation of a photolithographic process...
- Patent number 10,733,337
- Issue date Aug 4, 2020
- Carl Zeiss SMT GmbH
- Hans Michael Solowan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for detecting the position of a mask holder on a measuring t...
- Patent number 10,656,537
- Issue date May 19, 2020
- Carl Zeiss SMT GmbH
- Hans-Michael Solowan
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR DETECTING THE POSITION OF A MASK HOLDER ON A MEASURING T...
- Publication number 20190056674
- Publication date Feb 21, 2019
- Carl Zeiss SMT GMBH
- Hans-Michael Solowan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR THE SIMULATION OF A PHOTOLITHOGRAPHIC PROCESS...
- Publication number 20170228477
- Publication date Aug 10, 2017
- Carl Zeiss SMT GMBH
- Hans Michael Solowan
- G06 - COMPUTING CALCULATING COUNTING