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Patents Grants
last 30 patents
Information
Patent Grant
Processing system
Patent number
8,811,665
Issue date
Aug 19, 2014
KLEO Halbleitertechnik GmbH
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus
Patent number
8,314,921
Issue date
Nov 20, 2012
KLEO AG
Hans Opower
G02 - OPTICS
Information
Patent Grant
Exposure system
Patent number
8,248,581
Issue date
Aug 21, 2012
KLEO AG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for producing exposed structures
Patent number
8,027,018
Issue date
Sep 27, 2011
KLEO Halbleitertechnik GmbH & Co KG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure system
Patent number
7,705,967
Issue date
Apr 27, 2010
KLEO Maschinenbau AG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography exposure device having a plurality of radiation sources
Patent number
7,652,750
Issue date
Jan 26, 2010
KLEO Halbleitertechnik GmbH & Co KG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for exposing substrate materials
Patent number
7,019,818
Issue date
Mar 28, 2006
KLEO Halbleitertechnik BmbH & Co KG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography exposure device
Patent number
6,859,261
Issue date
Feb 22, 2005
KLEO Halbleitertechnik GmbH & Co KG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for generating an image
Patent number
6,741,225
Issue date
May 25, 2004
Deutsches Zentrum fuer Luft -und Raumfahrt e.V.
Uwe Brauch
G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information
Patent Grant
Lithography exposure device and lithography process
Patent number
6,586,169
Issue date
Jul 1, 2003
Deutsches Zentrum fuer Luft-und Raumfahrt e.V.
Uwe Brauch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser radiation source and process for generating a coherent total...
Patent number
6,570,896
Issue date
May 27, 2003
Deutsches Zentrum fuer Luft-und Raumfahrt e.V.
Norbert Bissinger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser system
Patent number
6,157,755
Issue date
Dec 5, 2000
Deutsches Zentrum fuer Luft- und Raumfahrt e.V.
Uwe Brauch
G02 - OPTICS
Information
Patent Grant
Process and device for the production of epitaxial layers
Patent number
6,013,130
Issue date
Jan 11, 2000
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Ralph Dieter
C30 - CRYSTAL GROWTH
Information
Patent Grant
Lithography exposure device
Patent number
6,002,466
Issue date
Dec 14, 1999
Deutsches Zentrum fuer Luft- und Raumfahrt e.V.
Uwe Brauch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser system
Patent number
5,936,993
Issue date
Aug 10, 1999
Deutsche Zentrum Fuer Luft- und Raumfahrt e.V.
Hans Opower
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for producing an image
Patent number
5,874,929
Issue date
Feb 23, 1999
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Hans Opower
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Grant
Laser system
Patent number
5,862,278
Issue date
Jan 19, 1999
Deutsche Forschungsanstalt fuer Luftund Raumfahrt e.V.
Uwe Brauch
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for imaging exit spots of a laser array
Patent number
5,818,546
Issue date
Oct 6, 1998
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Hans Opower
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Process and apparatus for producing a functional structure of a sem...
Patent number
5,736,464
Issue date
Apr 7, 1998
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Hans Opower
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Power-controlled, fractal laser system
Patent number
5,729,568
Issue date
Mar 17, 1998
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Hans Opower
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Process and apparatus for producing a functional structure of a sem...
Patent number
5,725,914
Issue date
Mar 10, 1998
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Hans Opower
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Gas discharge structure
Patent number
5,528,619
Issue date
Jun 18, 1996
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Hansjoerg Bochum
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Phase-controlled, fractal laser system
Patent number
5,513,195
Issue date
Apr 30, 1996
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Hans Opower
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Process for applying structured layers using laser transfer
Patent number
5,492,861
Issue date
Feb 20, 1996
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Hans Opower
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wave guide laser having a resonator mirror with successive reflecti...
Patent number
5,373,525
Issue date
Dec 13, 1994
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Rolf Nowack
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for removing material from a target
Patent number
5,361,275
Issue date
Nov 1, 1994
Deutsche Forschungsanstalt fuer Luftund Raumfahrt e.V.
Hans Opower
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Process for coating substrate material
Patent number
5,324,552
Issue date
Jun 28, 1994
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Hans Opower
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Waveguide laser with variable waveguide thickness
Patent number
5,220,577
Issue date
Jun 15, 1993
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Hans Opower
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for coating a substrate using a pulsed laser beam
Patent number
5,209,944
Issue date
May 11, 1993
Deutsche Forschungsanstalt fuer Luft- und Raumfahrt e.V.
Hans Opower
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Solid-state laser
Patent number
5,206,874
Issue date
Apr 27, 1993
Deutsche Forschungsanstalt
Hans Opower
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE SYSTEM
Publication number
20130120727
Publication date
May 16, 2013
KLEO AG
Hans Opower
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PROCESSING SYSTEM
Publication number
20120163660
Publication date
Jun 28, 2012
KLEO AG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus
Publication number
20090296063
Publication date
Dec 3, 2009
KLEO Maschinenbau AG
Hans Opower
G02 - OPTICS
Information
Patent Application
Exposure system
Publication number
20080316454
Publication date
Dec 25, 2008
KLEO Maschinenbau AG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure system
Publication number
20060244943
Publication date
Nov 2, 2006
KLEO Halbleitertechnik GmbH & Co KG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithography exposure device
Publication number
20060170893
Publication date
Aug 3, 2006
KLEO Halbleitertechnik GmbH & Co KG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and device for producing exposed structures
Publication number
20050282087
Publication date
Dec 22, 2005
KLEO Halbleitertechnik GmbH & Co KG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus for exposing substrate materials
Publication number
20050083509
Publication date
Apr 21, 2005
KLEO Halbleitertechnik GmbH & Co KG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithography exposure device
Publication number
20030160948
Publication date
Aug 28, 2003
KLEO Halbleitertechnik GmbH & Co KG
Hans Opower
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Laser radiation source and process for generating a coherent total...
Publication number
20020048292
Publication date
Apr 25, 2002
Deutsches Zentrum fuer Luft-und Raumfahrt e.V.
Norbert Bissinger
G02 - OPTICS
Information
Patent Application
Lithography exposure device and lithography process
Publication number
20010021484
Publication date
Sep 13, 2001
Uwe Brauch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY