Hans Van Der Laan

Person

Veldhoven, NL

People

Patents Applicationslast 30 patents

Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20070046920
- Publication date Mar 1, 2007
- ASML NETHERLANDS B.V.
- Hans Van Der Laan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology apparatus, lithographic apparatus, process apparatus metr...
- Publication number 20070013921
- Publication date Jan 18, 2007
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria Pellemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography measurements using scatterometry
- Publication number 20060192936
- Publication date Aug 31, 2006
- ASML NETHERLANDS B.V.
- Koen Van Ingen Schenau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060092397
- Publication date May 4, 2006
- ASML NETHERLANDS B.V.
- Hans Van Der Laan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, calibration me...
- Publication number 20060046165
- Publication date Mar 2, 2006
- ASML NETHERLANDS B.V.
- Hans Van Der Laan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method to determine the value of process parameters based on scatte...
- Publication number 20050185174
- Publication date Aug 25, 2005
- ASML NETHERLANDS B.V.
- Hans Van Der Laan
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20040227922
- Publication date Nov 18, 2004
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device manufacturing method and computer program
- Publication number 20040137677
- Publication date Jul 15, 2004
- ASML NETHERLANDS B.V.
- Martin Lowisch
- B82 - NANO-TECHNOLOGY
Information Patent Application
Test pattern, inspection method, and device manufacturing method
- Publication number 20040114132
- Publication date Jun 17, 2004
- ASML NETHERLANDS B.V,
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hans Van Der Laan

Person

Patents Applicationslast 30 patents

Lithographic apparatus and device manufacturing method

Metrology apparatus, lithographic apparatus, process apparatus metr...

Lithography measurements using scatterometry

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method, calibration me...

Method to determine the value of process parameters based on scatte...

Lithographic apparatus and device manufacturing method

Device manufacturing method and computer program

Test pattern, inspection method, and device manufacturing method