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Hanting ZHANG
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Shanghai, CN
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Patents Grants
last 30 patents
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Patent Grant
Coating packaged chamber parts for semiconductor plasma apparatus
Patent number
9,951,435
Issue date
Apr 24, 2018
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Xiaoming He
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Coating packaged chamber parts for semiconductor plasma apparatus
Patent number
9,617,633
Issue date
Apr 11, 2017
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Xiaoming He
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
COATING PACKAGED CHAMBER PARTS FOR SEMICONDUCTOR PLASMA APPARATUS
Publication number
20170241038
Publication date
Aug 24, 2017
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Xiaoming HE
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
COATING PACKAGED CHAMBER PARTS FOR SEMICONDUCTOR PLASMA APPARATUS
Publication number
20140120312
Publication date
May 1, 2014
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Xiaoming HE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COATING PACKAGED SHOWERHEAD PERFORMANCE ENHANCEMENT FOR SEMICONDUCT...
Publication number
20140117120
Publication date
May 1, 2014
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Xiaoming HE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...