Hao A Lu

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San Mateo, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma process for selectively etching oxide using fluoropropane or...
- Patent number 6,361,705
- Issue date Mar 26, 2002
- Applied Materials, Inc.
- Ruiping Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon carbide composite article particularly useful for plasma re...
- Patent number 5,904,778
- Issue date May 18, 1999
- Applied Materials, Inc.
- Hao A Lu
- H01 - BASIC ELECTRIC ELEMENTS