Membership
Tour
Register
Log in
Hao Chi
Follow
Person
San Mateo, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Film stack simplification for high aspect ratio patterning and vert...
Patent number
12,080,592
Issue date
Sep 3, 2024
Lam Research Corporation
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
REDUCED TEMPERATURE ETCHING OF DOPED SILICON OXIDE
Publication number
20250118568
Publication date
Apr 10, 2025
LAM RESEARCH CORPORATION
Jonathan CHURCH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERT...
Publication number
20240387258
Publication date
Nov 21, 2024
LAM RESEARCH CORPORATION
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERT...
Publication number
20220051938
Publication date
Feb 17, 2022
LAM RESEARCH CORPORATION
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS