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Hao Ton That
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San Diego, CA, US
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last 30 patents
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Patent Grant
Gas discharge laser output light beam parameter control
Patent number
7,471,708
Issue date
Dec 30, 2008
Cymer, Inc.
Herve A. Besaucele
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Gas discharge laser output light beam parameter control
Publication number
20060227839
Publication date
Oct 12, 2006
Cymer, Inc.
Herve A. Besaucele
H01 - BASIC ELECTRIC ELEMENTS