Haojiang Chen

Follow

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus and method
- Patent number 6,692,903
- Issue date Feb 17, 2004
- Applied Materials, Inc.
- Haojiang Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate cleaning apparatus and method
- Publication number 20020072016
- Publication date Jun 13, 2002
- APPLIED MATERIALS, INC.
- Haojiang Chen
- H01 - BASIC ELECTRIC ELEMENTS