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Haojiang Li
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Saratoga, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for process monitoring
Patent number
6,936,842
Issue date
Aug 30, 2005
Applied Materials, Inc.
Suraj Rengarajan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Monitoring process for oxide removal
Patent number
6,579,730
Issue date
Jun 17, 2003
Applied Materials, Inc.
Haojiang Li
G01 - MEASURING TESTING
Information
Patent Grant
Oxide etch process with high selectivity to nitride suitable for us...
Patent number
6,184,150
Issue date
Feb 6, 2001
Applied Materials Inc.
Chan-Lon Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Independent gas feeds in a plasma reactor
Patent number
6,009,830
Issue date
Jan 4, 2000
Applied Materials Inc.
Haojiang Li
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method and apparatus for process monitoring
Publication number
20030032207
Publication date
Feb 13, 2003
Suraj Rengarajan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Monitoring process for oxide removal
Publication number
20030017628
Publication date
Jan 23, 2003
APPLIED MATERIALS, INC.
Haojiang Li
G01 - MEASURING TESTING