Haoquan Yan

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 12,087,561
- Issue date Sep 10, 2024
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Edge ring arrangement with moveable edge rings
- Patent number 12,027,410
- Issue date Jul 2, 2024
- Lam Research Corporation
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 11,710,623
- Issue date Jul 25, 2023
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 11,031,215
- Issue date Jun 8, 2021
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moveable edge coupling ring for edge process control during semicon...
- Patent number 10,658,222
- Issue date May 19, 2020
- Lam Research Corporation
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge ring centering method using ring dynamic alignment data
- Patent number 10,541,168
- Issue date Jan 21, 2020
- Lam Research Corporation
- Ali Sucipto Tan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR ETCHING A CARBON CONTAINING LAYER
- Publication number 20240379375
- Publication date Nov 14, 2024
- LAM RESEARCH CORPORATION
- Xiaofeng SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS
- Publication number 20240355667
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20230317437
- Publication date Oct 5, 2023
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20210257195
- Publication date Aug 19, 2021
- LAM RESEARCH CORPORATION
- John Stephen DREWERY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS
- Publication number 20210183687
- Publication date Jun 17, 2021
- LAM RESEARCH CORPORATION
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20200105509
- Publication date Apr 2, 2020
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE RING FOCUSED DEPOSITION DURING A CLEANING PROCESS OF A PROCESS...
- Publication number 20190341275
- Publication date Nov 7, 2019
- LAM RESEARCH CORPORATION
- Yansha JIN
- B08 - CLEANING
Information Patent Application
MOVEABLE EDGE RING DESIGN
- Publication number 20190013232
- Publication date Jan 10, 2019
- LAM RESEARCH CORPORATION
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING CENTERING METHOD USING RING DYNAMIC ALIGNMENT DATA
- Publication number 20180138069
- Publication date May 17, 2018
- LAM RESEARCH CORPORATION
- Ali Sucipto Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICON...
- Publication number 20160211166
- Publication date Jul 21, 2016
- LAM RESEARCH CORPORATION
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS

Haoquan Yan

Person

Patents Grantslast 30 patents

Vacuum pump protection against deposition byproduct buildup

Edge ring arrangement with moveable edge rings

Vacuum pump protection against deposition byproduct buildup

Vacuum pump protection against deposition byproduct buildup

Moveable edge coupling ring for edge process control during semicon...

Edge ring centering method using ring dynamic alignment data

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR ETCHING A CARBON CONTAINING LAYER

EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

EDGE RING FOCUSED DEPOSITION DURING A CLEANING PROCESS OF A PROCESS...

MOVEABLE EDGE RING DESIGN

EDGE RING CENTERING METHOD USING RING DYNAMIC ALIGNMENT DATA

MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICON...