Harald Kirchner

Follow

Person

Munchen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical element unit and method of supporting an optical element
- Patent number 9,134,501
- Issue date Sep 15, 2015
- Carl Zeiss SMT GmbH
- Dirk Schaffer
- G02 - OPTICS
Information Patent Grant
Optical module with minimized overrun of the optical element
- Patent number 8,441,747
- Issue date May 14, 2013
- Carl Zeiss SMT GmbH
- Willi Heintel
- G02 - OPTICS
Information Patent Grant
Reflecting optical element with eccentric optical passageway
- Patent number 7,760,327
- Issue date Jul 20, 2010
- Carl Zeiss SMT AG
- Hans-Jürgen Scherle
- G02 - OPTICS
Information Patent Grant
Optical subassembly and projection objective in semiconductor litho...
- Patent number 7,448,763
- Issue date Nov 11, 2008
- Carl Zeiss SMT AG
- Andreas Frommeyer
- G02 - OPTICS
Information Patent Grant
Optical component that includes a material having a thermal longitu...
- Patent number 7,428,037
- Issue date Sep 23, 2008
- Carl Zeiss SMT AG
- Timo Laufer
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Optical Element Unit And Method Of Supporting An Optical Element
- Publication number 20160109679
- Publication date Apr 21, 2016
- Carl Zeiss SMT GMBH
- Dirk Schaffer
- G02 - OPTICS
Information Patent Application
Optical element unit and method of supporting an optical element
- Publication number 20090147229
- Publication date Jun 11, 2009
- Carl Zeiss SMT AG
- Dirk Schaffer
- G02 - OPTICS
Information Patent Application
Optical module with minimized overrun of the optical element
- Publication number 20080204689
- Publication date Aug 28, 2008
- Carl Zeiss SMT AG
- Willi Heintel
- G02 - OPTICS
Information Patent Application
Optical subassembly and projection objective in semiconductor litho...
- Publication number 20070014037
- Publication date Jan 18, 2007
- Andreas Frommeyer
- G02 - OPTICS
Information Patent Application
Reflecting optical element with eccentric optical passageway
- Publication number 20060262704
- Publication date Nov 23, 2006
- Carl Zeiss SMT AG
- Hans-Jurgen Scherle
- G02 - OPTICS
Information Patent Application
Method for the targeted deformation of an optical element
- Publication number 20050280910
- Publication date Dec 22, 2005
- Jean Noel Fehr
- G02 - OPTICS
Information Patent Application
Optical component that includes a material having a thermal longitu...
- Publication number 20050207001
- Publication date Sep 22, 2005
- Timo Laufer
- G02 - OPTICS