Harald WOELFLE

Person

Waldkirch, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Lens module comprising at least one exchangeable optical element
- Patent number 9,703,098
- Issue date Jul 11, 2017
- Carl Zeiss SMT GmbH
- Guido Soyez
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for replacing objective parts
- Patent number 9,551,944
- Issue date Jan 24, 2017
- Carl Zeiss SMT GmbH
- Bernhard Geuppert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lens module comprising at least one exchangeable optical element
- Patent number 9,423,695
- Issue date Aug 23, 2016
- Carl Zeiss SMT GmbH
- Guido Soyez
- G02 - OPTICS
Information Patent Grant
Lens module comprising at least one exchangeable optical element
- Patent number 8,939,587
- Issue date Jan 27, 2015
- Carl Zeiss SMT GmbH
- Guido Soyez
- G02 - OPTICS
Information Patent Grant
Lens module comprising at least one exchangeable optical element
- Patent number 8,376,559
- Issue date Feb 19, 2013
- Carl Zeiss SMT GmbH
- Guido Soyez
- G02 - OPTICS
Information Patent Grant
Lens module comprising at least one exchangeable optical element
- Patent number 8,092,029
- Issue date Jan 10, 2012
- Carl Zeiss SMT GmbH
- Guido Soyez
- G02 - OPTICS
Information Patent Grant
Method for cleaning an EUV lithography device, method for measuring...
- Patent number 7,911,598
- Issue date Mar 22, 2011
- Carl Zeiss SMT AG
- Dieter Kraus
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
- Publication number 20180031827
- Publication date Feb 1, 2018
- Carl Zeiss SMT GMBH
- Guido SOYEZ
- G02 - OPTICS
Information Patent Application
LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
- Publication number 20160357012
- Publication date Dec 8, 2016
- Carl Zeiss SMT GMBH
- Guido SOYEZ
- G02 - OPTICS
Information Patent Application
LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
- Publication number 20150138521
- Publication date May 21, 2015
- Carl Zeiss SMT GMBH
- Guido SOYEZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Device for Replacing Objective Parts
- Publication number 20140359990
- Publication date Dec 11, 2014
- Bernhard Geuppert
- B08 - CLEANING
Information Patent Application
LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
- Publication number 20130155509
- Publication date Jun 20, 2013
- Carl Zeiss SMT GMBH
- Guido SOYEZ
- G02 - OPTICS
Information Patent Application
LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
- Publication number 20120105958
- Publication date May 3, 2012
- Carl Zeiss SMT GMBH
- Guido SOYEZ
- G02 - OPTICS
Information Patent Application
METHOD FOR CLEANING AN EUV LITHOGRAPHY DEVICE, METHOD FOR MEASURING...
- Publication number 20100034349
- Publication date Feb 11, 2010
- Carl Zeiss SMT AG
- Dieter KRAUS
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR REPLACING OBJECTIVE PARTS
- Publication number 20090260654
- Publication date Oct 22, 2009
- Carl Zeiss SMT AG
- Bernhard Geuppert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Lens Module Comprising at Least One Exchangeable Optical Element
- Publication number 20080137192
- Publication date Jun 12, 2008
- Guido Soyez
- G02 - OPTICS

Harald WOELFLE

Person

Patents Grantslast 30 patents

Lens module comprising at least one exchangeable optical element

Method for replacing objective parts

Lens module comprising at least one exchangeable optical element

Lens module comprising at least one exchangeable optical element

Lens module comprising at least one exchangeable optical element

Lens module comprising at least one exchangeable optical element

Method for cleaning an EUV lithography device, method for measuring...

Patents Applicationslast 30 patents

LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT

LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT

LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT

Method and Device for Replacing Objective Parts

LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT

LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT

METHOD FOR CLEANING AN EUV LITHOGRAPHY DEVICE, METHOD FOR MEASURING...

METHOD AND DEVICE FOR REPLACING OBJECTIVE PARTS

Lens Module Comprising at Least One Exchangeable Optical Element