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Hari Hegde
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Fremont, CA, US
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last 30 patents
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Patent Grant
Grid assemblies for use in ion beam etching systems and methods of...
Patent number
8,703,001
Issue date
Apr 22, 2014
Sarpangala Hari Harakeshava Hegde
Hari Hegde
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SYSTEMS AND METHODS FOR ION BEAM ETCHING
Publication number
20170140953
Publication date
May 18, 2017
Plasma-Therm NES LLC
Hari Hegde
H01 - BASIC ELECTRIC ELEMENTS