Hari K. PONNEKANTI

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for environmental control of dies and substrates for hybr...
- Patent number 12,001,193
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Ying Wang
- G05 - CONTROLLING REGULATING
Information Patent Grant
Dynamic phased array plasma source for complete plasma coverage of...
- Patent number 11,948,783
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Paired dynamic parallel plate capacitively coupled plasmas
- Patent number 11,923,172
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for improving chemical utilization rate in de...
- Patent number 11,713,508
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF power source operation in plasma enhanced processes
- Patent number 11,631,583
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Farhad Moghadam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for improving chemical utilization rate in de...
- Patent number 11,396,703
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Paired dynamic parallel plate capacitively coupled plasmas
- Patent number 11,282,676
- Issue date Mar 22, 2022
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 11,031,262
- Issue date Jun 8, 2021
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary plasma electrical feedthrough
- Patent number 10,854,432
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Hari K. Ponnekanti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor process equipment
- Patent number 10,734,265
- Issue date Aug 4, 2020
- Applied Materials, Inc.
- Karthik Janakiraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 10,636,684
- Issue date Apr 28, 2020
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single oxide metal deposition chamber
- Patent number 10,597,785
- Issue date Mar 24, 2020
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering showerhead
- Patent number 10,577,689
- Issue date Mar 3, 2020
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer swapper
- Patent number 10,518,418
- Issue date Dec 31, 2019
- Applied Materials, Inc.
- Dale R. Du Bois
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor process equipment
- Patent number 10,483,141
- Issue date Nov 19, 2019
- Applied Materials, Inc.
- Karthik Janakiraman
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Hydrogen partial pressure control in a vacuum process chamber
- Patent number 10,435,787
- Issue date Oct 8, 2019
- Applied Materials, Inc.
- James L'Heureux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 10,403,515
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of processing wafers with compressive or tensi...
- Patent number 10,403,535
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Zheng John Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
On-board metrology (OBM) design and implication in process tool
- Patent number 10,388,549
- Issue date Aug 20, 2019
- Applied Materials, Inc.
- Khokan C. Paul
- G05 - CONTROLLING REGULATING
Information Patent Grant
Processing system containing an isolation region separating a depos...
- Patent number 10,236,197
- Issue date Mar 19, 2019
- Applied Materials, Inc.
- Karthik Janakiraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor process equipment
- Patent number 10,056,279
- Issue date Aug 21, 2018
- Applied Materials, Inc.
- Karthik Janakiraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer swapper
- Patent number 9,889,567
- Issue date Feb 13, 2018
- Applied Materials, Inc.
- Dale R. Du Bois
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Methods of forming solar cells and solar cell modules
- Patent number 9,040,409
- Issue date May 26, 2015
- Applied Materials, Inc.
- Prabhat Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Homing device for magnetron rotating on two arms
- Patent number 8,900,427
- Issue date Dec 2, 2014
- Applied Materials, Inc.
- Keith A. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of manufacturing solar cell devices
- Patent number 8,859,324
- Issue date Oct 14, 2014
- Applied Materials, Inc.
- Michael P. Stewart
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Electrostatic chuck assembly
- Patent number 8,390,980
- Issue date Mar 5, 2013
- Applied Materials, Inc.
- Steven V. Sansoni
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Surface cleaning and texturing process for crystalline solar cells
- Patent number 8,129,212
- Issue date Mar 6, 2012
- Applied Materials, Inc.
- Kapila Wijekoon
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Coaxial shafts for radial positioning of rotating magnetron
- Patent number 8,021,527
- Issue date Sep 20, 2011
- Applied Materials, Inc.
- Keith A. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tandem process chamber
- Patent number 7,655,092
- Issue date Feb 2, 2010
- Applied Materials, Inc.
- Kevin Fairbairn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam treatment apparatus
- Patent number 7,049,606
- Issue date May 23, 2006
- Applied Materials, Inc.
- Alexandros T. Demos
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
REMOVING ELASTOMERS FROM ELECTRONIC DEVICE MANUFACTURING EQUIPMENT...
- Publication number 20240375221
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Gagandeep Singh Joshi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of...
- Publication number 20240162020
- Publication date May 16, 2024
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR ENVIRONMENTAL CONTROL OF DIES AND SUBSTRATES FOR HYBR...
- Publication number 20230288916
- Publication date Sep 14, 2023
- Ying WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Methods for Improving Chemical Utilization Rate in De...
- Publication number 20220316061
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Methods for Improving Chemical Utilization Rate in De...
- Publication number 20220195600
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PAIRED DYNAMIC PARALLEL PLATE CAPACITIVELY COUPLED PLASMAS
- Publication number 20220165540
- Publication date May 26, 2022
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF Power Source Operation In Plasma Enhanced Processes
- Publication number 20210125820
- Publication date Apr 29, 2021
- Applied Materials, Inc.
- Farhad Moghadam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Pumps For Single And Multi-Process Chamber Flow Stream Sharing
- Publication number 20200256228
- Publication date Aug 13, 2020
- Applied Materials, Inc.
- Michael Rice
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Application
LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
- Publication number 20200234982
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Saptarshi BASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYRODGEN PARTIAL PRESSURE CONTROL IN A VACUUM PROCESS CHAMBER
- Publication number 20200032392
- Publication date Jan 30, 2020
- Applied Materials, Inc.
- James L'HEUREUX
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Paired Dynamic Parallel Plate Capacitively Coupled Plasmas
- Publication number 20190385819
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
- Publication number 20190371630
- Publication date Dec 5, 2019
- Applied Materials, Inc.
- Saptarshi BASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS EQUIPMENT
- Publication number 20180308735
- Publication date Oct 25, 2018
- Applied Materials, Inc.
- Karthik JANAKIRAMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Atomic Layer Deposition Tool
- Publication number 20180155834
- Publication date Jun 7, 2018
- Applied Materials, Inc.
- Mukund Srinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROGEN PARTIAL PRESSURE CONTROL IN A VACUUM PROCESS CHAMBER
- Publication number 20180135171
- Publication date May 17, 2018
- Applied Materials, Inc.
- James L'HEUREUX
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of...
- Publication number 20180138023
- Publication date May 17, 2018
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER SWAPPER
- Publication number 20180117771
- Publication date May 3, 2018
- Applied Materials, Inc.
- Dale R. DU BOIS
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SPUTTERING SHOWERHEAD
- Publication number 20180087155
- Publication date Mar 29, 2018
- Applied Materials, Inc.
- Anantha K. SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS EQUIPMENT
- Publication number 20180076075
- Publication date Mar 15, 2018
- Applied Materials, Inc.
- Karthik JANAKIRAMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE OXIDE METAL DEPOSITION CHAMBER
- Publication number 20180073150
- Publication date Mar 15, 2018
- Applied Materials, Inc.
- Anantha K. SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTARY PLASMA ELECTRICAL FEEDTHROUGH
- Publication number 20170352558
- Publication date Dec 7, 2017
- Applied Materials, Inc.
- Hari K. PONNEKANTI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
QUAD CHAMBER AND PLATFORM HAVING MULTIPLE QUAD CHAMBERS
- Publication number 20170194174
- Publication date Jul 6, 2017
- Applied Materials, Inc.
- Karthik JANAKIRAMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ON-BOARD METROLOGY (OBM) DESIGN AND IMPLICATION IN PROCESS TOOL
- Publication number 20170148654
- Publication date May 25, 2017
- Applied Materials, Inc.
- Khokan C. PAUL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
- Publication number 20170092511
- Publication date Mar 30, 2017
- Applied Materials, Inc.
- Saptarshi BASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SWAPPER
- Publication number 20160314995
- Publication date Oct 27, 2016
- Applied Materials, Inc.
- Dale R. DU BOIS
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR PROCESS EQUIPMENT
- Publication number 20160218029
- Publication date Jul 28, 2016
- Applied Materials, Inc.
- Karthik JANAKIRAMAN
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Processing System Containing An Isolation Region separating a Depos...
- Publication number 20160133489
- Publication date May 12, 2016
- Applied Materials, Inc.
- Karthik JANAKIRAMAN
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD AND APPARATUS OF PROCESSING WAFERS WITH COMPRESSIVE OR TENSI...
- Publication number 20160049323
- Publication date Feb 18, 2016
- Applied Materials, Inc.
- Zheng John YE
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
METHODS OF FORMING SOLAR CELLS AND SOLAR CELL MODULES
- Publication number 20140273338
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Prabhat KUMAR
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
IN SITU SILICON SURFACE PRE-CLEAN FOR HIGH PERFORMANCE PASSIVATION...
- Publication number 20140213016
- Publication date Jul 31, 2014
- Applied Materials, Inc.
- Shuran SHENG
- H01 - BASIC ELECTRIC ELEMENTS

Hari K. PONNEKANTI

Person

Patents Grantslast 30 patents

Apparatus for environmental control of dies and substrates for hybr...

Dynamic phased array plasma source for complete plasma coverage of...

Paired dynamic parallel plate capacitively coupled plasmas

Apparatus and methods for improving chemical utilization rate in de...

RF power source operation in plasma enhanced processes

Apparatus and methods for improving chemical utilization rate in de...

Paired dynamic parallel plate capacitively coupled plasmas

Loadlock integrated bevel etcher system

Rotary plasma electrical feedthrough

Semiconductor process equipment

Loadlock integrated bevel etcher system

Single oxide metal deposition chamber

Sputtering showerhead

Wafer swapper

Semiconductor process equipment

Hydrogen partial pressure control in a vacuum process chamber

Loadlock integrated bevel etcher system

Method and apparatus of processing wafers with compressive or tensi...

On-board metrology (OBM) design and implication in process tool

Processing system containing an isolation region separating a depos...

Semiconductor process equipment

Wafer swapper

Methods of forming solar cells and solar cell modules

Homing device for magnetron rotating on two arms

Methods of manufacturing solar cell devices

Electrostatic chuck assembly

Surface cleaning and texturing process for crystalline solar cells

Coaxial shafts for radial positioning of rotating magnetron

Tandem process chamber

Electron beam treatment apparatus

Patents Applicationslast 30 patents

REMOVING ELASTOMERS FROM ELECTRONIC DEVICE MANUFACTURING EQUIPMENT...

Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of...

APPARATUS FOR ENVIRONMENTAL CONTROL OF DIES AND SUBSTRATES FOR HYBR...

Apparatus and Methods for Improving Chemical Utilization Rate in De...

Apparatus and Methods for Improving Chemical Utilization Rate in De...

PAIRED DYNAMIC PARALLEL PLATE CAPACITIVELY COUPLED PLASMAS

RF Power Source Operation In Plasma Enhanced Processes

Vacuum Pumps For Single And Multi-Process Chamber Flow Stream Sharing

LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM

HYRODGEN PARTIAL PRESSURE CONTROL IN A VACUUM PROCESS CHAMBER

Paired Dynamic Parallel Plate Capacitively Coupled Plasmas

LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM

SEMICONDUCTOR PROCESS EQUIPMENT

Integrated Atomic Layer Deposition Tool

HYDROGEN PARTIAL PRESSURE CONTROL IN A VACUUM PROCESS CHAMBER

Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of...

WAFER SWAPPER

SPUTTERING SHOWERHEAD

SEMICONDUCTOR PROCESS EQUIPMENT

SINGLE OXIDE METAL DEPOSITION CHAMBER

ROTARY PLASMA ELECTRICAL FEEDTHROUGH

QUAD CHAMBER AND PLATFORM HAVING MULTIPLE QUAD CHAMBERS

ON-BOARD METROLOGY (OBM) DESIGN AND IMPLICATION IN PROCESS TOOL

LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM

WAFER SWAPPER

SEMICONDUCTOR PROCESS EQUIPMENT

Processing System Containing An Isolation Region separating a Depos...

METHOD AND APPARATUS OF PROCESSING WAFERS WITH COMPRESSIVE OR TENSI...

METHODS OF FORMING SOLAR CELLS AND SOLAR CELL MODULES

IN SITU SILICON SURFACE PRE-CLEAN FOR HIGH PERFORMANCE PASSIVATION...