Hari PATHANGI

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Chennai, IN

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Patents Grantslast 30 patents

Information Patent Grant
Using absolute Z-height values for synergy between tools
- Patent number 11,600,497
- Issue date Mar 7, 2023
- KLA Corporation
- Sandeep Madhogarhia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Using deep learning based defect detection and classification schem...
- Patent number 10,672,588
- Issue date Jun 2, 2020
- KLA-Tencor Corporation
- Hari Pathangi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Overlay measurements of overlapping target structures based on symm...
- Patent number 10,473,460
- Issue date Nov 12, 2019
- KLA-Tencor Corporation
- Nadav Gutman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
USING ABSOLUTE Z-HEIGHT VALUES FOR SYNERGY BETWEEN TOOLS
- Publication number 20200321221
- Publication date Oct 8, 2020
- KLA Corporation
- Sandeep Madhogarhia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USING DEEP LEARNING BASED DEFECT DETECTION AND CLASSIFICATION SCHEM...
- Publication number 20200161081
- Publication date May 21, 2020
- KLA-Tencor Corporation
- Hari Pathangi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Overlay Measurements of Overlapping Target Structures Based on Symm...
- Publication number 20190178639
- Publication date Jun 13, 2019
- KLA-Tencor Corporation
- Nadav Gutman
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION-GUIDED CRITICAL SITE SELECTION FOR CRITICAL DIMENSION ME...
- Publication number 20190041202
- Publication date Feb 7, 2019
- KLA-Tencor Corporation
- Jagdish Chandra SARASWATULA
- G06 - COMPUTING CALCULATING COUNTING