Harihara Krishnan Krishnamoorthy

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Tempe, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Detection method for seized traveling lift pins in wafer processing...
- Patent number 12,249,534
- Issue date Mar 11, 2025
- ASM IP Holding B.V.
- Eric Shero
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING A LIQUID
- Publication number 20230080843
- Publication date Mar 16, 2023
- ASM IP HOLDING B.V.
- Harihara Krishnan Krishnamoorthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION METHOD FOR SEIZED TRAVELING LIFT PINS IN WAFER PROCESSING...
- Publication number 20230054779
- Publication date Feb 23, 2023
- ASM IP HOLDING B.V.
- Eric Shero
- H01 - BASIC ELECTRIC ELEMENTS