Harlan I. Halsey

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Woodside, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods to minimize moisture condensation over a substrate in a rap...
- Patent number 6,750,155
- Issue date Jun 15, 2004
- Lam Research Corporation
- Harlan I. Halsey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diffuser and rapid cycle chamber
- Patent number 6,663,025
- Issue date Dec 16, 2003
- Lam Research Corporation
- Harlan I. Halsey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for creating an ultra-clean mini-environment t...
- Patent number 6,543,981
- Issue date Apr 8, 2003
- LAM Research Corp.
- Harlan I. Halsey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-planar magnet tracking during magnetron sputtering
- Patent number 5,855,744
- Issue date Jan 5, 1999
- Applied Komatsu Technology, Inc.
- Harlan I. Halsey
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Rapid cycle chamber having a top vent with nitrogen purge
- Publication number 20040194268
- Publication date Oct 7, 2004
- Lam Research Corporation
- Harlan I. Halsey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rapid cycle chamber having a top vent with nitrogen purge
- Publication number 20030172508
- Publication date Sep 18, 2003
- Lam Research Corporation
- Harlan I. Halsey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...