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Harmen Klaas Van Der Schoot
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Vught, NL
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last 30 patents
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Patent Application
Optimized correction of water thermal deformations in a lithographi...
Publication number
20070257209
Publication date
Nov 8, 2007
ASML NETHERLANDS B.V.
Joost Jeroen Ottens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and stage apparatus
Publication number
20070188724
Publication date
Aug 16, 2007
ASML NETHERLANDS B.V.
Fransicus Mathijs Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070188723
Publication date
Aug 16, 2007
ASML NETHERLANDS B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060049698
Publication date
Mar 9, 2006
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY