Harmen Klaas Ven Der Schoot

Follow

Person

Vught, NL

People

Patents Applicationslast 30 patents

Information Patent Application
PELLICLE FOR RETICLE AND MULTILAYER MIRROR
- Publication number 20140160455
- Publication date Jun 12, 2014
- ASML NETHERLANDS B.V.
- Andrei Mikhailovich YAKUNIN
- B82 - NANO-TECHNOLOGY