Harmut Enkisch

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection objective and method for its manufacture
- Patent number 8,944,615
- Issue date Feb 3, 2015
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION OBJECTIVE AND METHOD FOR ITS MANUFACTURE
- Publication number 20100149517
- Publication date Jun 17, 2010
- Carl Zeiss SMT AG
- Hans-Juergen Mann
- G02 - OPTICS