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Campbell, CA, US
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last 30 patents
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Patent Grant
Subnanometer-level light-based substrate cleaning mechanism
Patent number
11,830,726
Issue date
Nov 28, 2023
Planar Semiconductor Corporation Pte. Ltd.
Rubinder S. Randhawa
B08 - CLEANING
Information
Patent Grant
Subnanometer-level light-based substrate cleaning mechanism
Patent number
11,069,521
Issue date
Jul 20, 2021
Planar Semiconductor, Inc.
Rubinder S. Randhawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sub-nanometer-level substrate cleaning mechanism
Patent number
10,985,039
Issue date
Apr 20, 2021
Planar Semiconductor, Inc.
Rubinder S. Randhawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Removal of process effluents
Patent number
10,892,172
Issue date
Jan 12, 2021
Planar Semiconductor, Inc.
Rubinder S. Randhawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for precision cleaning and drying flat objects
Patent number
9,418,831
Issue date
Aug 16, 2016
Planar Semiconductor, Inc.
Rubinder Randhawa
B08 - CLEANING
Information
Patent Grant
Single-chamber apparatus for precision cleaning and drying of flat...
Patent number
9,275,849
Issue date
Mar 1, 2016
Planar Semiconductor, Inc.
Rubinder Randhawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Holding and rotary driving mechanism for flat objects
Patent number
9,202,725
Issue date
Dec 1, 2015
Planar Semiconductor, Inc.
Rubinder S. Randhawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBNANOMETER-LEVEL LIGHT-BASED SUBSTRATE CLEANING MECHANISM
Publication number
20210313173
Publication date
Oct 7, 2021
Planar Semiconductor Corporation Pte. Ltd.
Rubinder S. Randhawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBNANOMETER-LEVEL LIGHT-BASED SUBSTRATE CLEANING MECHANISM
Publication number
20200219722
Publication date
Jul 9, 2020
Planar Semiconductor, Inc.
Rubinder S. RANDHAWA
B08 - CLEANING
Information
Patent Application
REMOVAL OF PROCESS EFFLUENTS
Publication number
20190378729
Publication date
Dec 12, 2019
Planar Semiconductor, Inc.
Rubinder S. RANDHAWA
B08 - CLEANING
Information
Patent Application
SUB-NANOMETER-LEVEL SUBSTRATE CLEANING MECHANISM
Publication number
20190371629
Publication date
Dec 5, 2019
Planar Semiconductor, Inc.
Rubinder S. Randhawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for precision cleaning and drying flat objects
Publication number
20090032062
Publication date
Feb 5, 2009
Planar Semiconductor, Inc.
Rubinder Randhawa
B08 - CLEANING
Information
Patent Application
Single-chamber apparatus for precision cleaning and drying of flat...
Publication number
20090032070
Publication date
Feb 5, 2009
Planar Semiconductor, Inc.
Rubinder Randhawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Holding and rotary driving mechanism for flat objects
Publication number
20080017225
Publication date
Jan 24, 2008
Planar Semiconductor, Inc.
Rubinder S. Randhawa
H01 - BASIC ELECTRIC ELEMENTS