Harry H. H. M. Cox

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Servo control method and its application in a lithographic apparatus
- Patent number 6,420,716
- Issue date Jul 16, 2002
- ASML Netherlands B.V.
- Harry H. H. M. Cox
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY