Membership
Tour
Register
Log in
Harry Q. Lee
Follow
Person
Los Altos, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Technique for training neural network for use in in-situ monitoring...
Patent number
12,136,574
Issue date
Nov 5, 2024
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Trained neural network in in-situ monitoring during polishing and p...
Patent number
12,057,354
Issue date
Aug 6, 2024
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Profile control with multiple instances of contol algorithm during...
Patent number
11,865,664
Issue date
Jan 9, 2024
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Switching control algorithms on detection of exposure of underlying...
Patent number
11,850,699
Issue date
Dec 26, 2023
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Technique for training neural network for use in in-situ monitoring...
Patent number
11,791,224
Issue date
Oct 17, 2023
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Compensation for substrate doping for in-situ electromagnetic induc...
Patent number
11,780,045
Issue date
Oct 10, 2023
Applied Materials, Inc.
Wei Lu
B24 - GRINDING POLISHING
Information
Patent Grant
Using a trained neural network for use in in-situ monitoring during...
Patent number
11,658,078
Issue date
May 23, 2023
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Polishing apparatus using machine learning and compensation for pad...
Patent number
11,524,382
Issue date
Dec 13, 2022
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus using neural network for monitoring
Patent number
10,994,389
Issue date
May 4, 2021
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Display of spectra contour plots versus time for semiconductor proc...
Patent number
10,948,900
Issue date
Mar 16, 2021
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Grant
Chattering correction for accurate sensor position determination on...
Patent number
10,898,986
Issue date
Jan 26, 2021
Applied Materials, Inc.
Harry Q. Lee
B24 - GRINDING POLISHING
Information
Patent Grant
Endpoint method using peak location of spectra contour plots versus...
Patent number
9,886,026
Issue date
Feb 6, 2018
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Grant
Dynamically tracking spectrum features for endpoint detection
Patent number
9,649,743
Issue date
May 16, 2017
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Grant
Limiting adjustment of polishing rates during substrate polishing
Patent number
9,607,910
Issue date
Mar 28, 2017
Applied Materials, Inc.
Dominic J. Benvegnu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic generation of reference spectra for optical monitoring of...
Patent number
9,579,767
Issue date
Feb 28, 2017
Applied Materials, Inc.
Jun Qian
B24 - GRINDING POLISHING
Information
Patent Grant
Limiting adjustment of polishing rates during substrate polishing
Patent number
9,490,186
Issue date
Nov 8, 2016
Applied Materials, Inc.
Dominic J. Benvegnu
B24 - GRINDING POLISHING
Information
Patent Grant
Techniques for matching spectra
Patent number
9,482,610
Issue date
Nov 1, 2016
Applied Materials, Inc.
Kiran Lall Shrestha
B24 - GRINDING POLISHING
Information
Patent Grant
Adjustment of polishing rates during substrate polishing with predi...
Patent number
9,375,824
Issue date
Jun 28, 2016
Applied Materials, Inc.
Dominic J. Benvegnu
B24 - GRINDING POLISHING
Information
Patent Grant
Adjusting polishing rates by using spectrographic monitoring of a s...
Patent number
9,346,146
Issue date
May 24, 2016
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing control using weighting with default sequence
Patent number
9,296,084
Issue date
Mar 29, 2016
Applied Materials, Inc.
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
Feed forward and feed-back techniques for in-situ process control
Patent number
9,289,875
Issue date
Mar 22, 2016
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Grant
Dynamically tracking spectrum features for endpoint detection
Patent number
9,283,653
Issue date
Mar 15, 2016
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Grant
Endpoint detection during polishing using integrated differential i...
Patent number
9,248,544
Issue date
Feb 2, 2016
Applied Materials, Inc.
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
Multi-platen multi-head polishing architecture
Patent number
9,227,293
Issue date
Jan 5, 2016
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Grant
User-input functions for data sequences in polishing endpoint detec...
Patent number
9,168,630
Issue date
Oct 27, 2015
Applied Materials, Inc.
Harry Q. Lee
B24 - GRINDING POLISHING
Information
Patent Grant
Using spectra to determine polishing endpoints
Patent number
9,142,466
Issue date
Sep 22, 2015
Applied Materials, Inc.
Harry Q. Lee
B24 - GRINDING POLISHING
Information
Patent Grant
Endpoint method using peak location of spectra contour plots versus...
Patent number
8,977,379
Issue date
Mar 10, 2015
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Grant
Selecting reference libraries for monitoring of multiple zones on a...
Patent number
8,954,186
Issue date
Feb 10, 2015
Applied Materials, Inc.
Jun Qian
G05 - CONTROLLING REGULATING
Information
Patent Grant
Adaptively tracking spectrum features for endpoint detection
Patent number
8,930,013
Issue date
Jan 6, 2015
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Grant
Spectrographic monitoring of a substrate during processing using in...
Patent number
8,874,250
Issue date
Oct 28, 2014
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SIGNAL PROCESSING FOR FINDING SUBSTRATE NOTCH
Publication number
20250153309
Publication date
May 15, 2025
Applied Materials, Inc.
Nojan Motamedi
B24 - GRINDING POLISHING
Information
Patent Application
FINDING SUBSTRATE NOTCH ON SUBSTRATE BETWEEN PLATENS IN CHEMICAL ME...
Publication number
20250108474
Publication date
Apr 3, 2025
Applied Materials, Inc.
Nojan Motamedi
B24 - GRINDING POLISHING
Information
Patent Application
PROCESS CONTROL METHOD FOR PATTERN WAFER INDEX POLISHING
Publication number
20240371646
Publication date
Nov 7, 2024
Applied Materials, Inc.
Jimin ZHANG
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR DETECTION OF WAFER SLIPPAGE
Publication number
20240308019
Publication date
Sep 19, 2024
Applied Materials, Inc.
Wei Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UNDERLAYER TOPOGRAPHY METAL RESIDUE DETECTION AND OVERPOLISHING STR...
Publication number
20240165768
Publication date
May 23, 2024
Applied Materials, Inc.
Kun XU
B24 - GRINDING POLISHING
Information
Patent Application
SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING...
Publication number
20240116152
Publication date
Apr 11, 2024
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...
Publication number
20240014080
Publication date
Jan 11, 2024
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
EDDY CURRENT MONITORING TO DETECT VIBRATION IN POLISHING
Publication number
20230286107
Publication date
Sep 14, 2023
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
TRAINED NEURAL NETWORK IN IN-SITU MONITORING DURING POLISHING AND P...
Publication number
20230290691
Publication date
Sep 14, 2023
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD...
Publication number
20230085787
Publication date
Mar 23, 2023
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
FOURIER FILTERING OF SPECTRAL DATA FOR MEASURING LAYER THICKNESS DU...
Publication number
20220371152
Publication date
Nov 24, 2022
Applied Materials, Inc.
Benjamin Cherian
B24 - GRINDING POLISHING
Information
Patent Application
PROFILE CONTROL WITH MULTIPLE INSTANCES OF CONTOL ALGORITHM DURING...
Publication number
20210379722
Publication date
Dec 9, 2021
Applied Materials, Inc.
Kun Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROFILE CONTROL DURING POLISHING OF A STACK OF ADJACENT CONDUCTIVE...
Publication number
20210379721
Publication date
Dec 9, 2021
Applied Materials, Inc.
Kun Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING...
Publication number
20210379724
Publication date
Dec 9, 2021
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
COMPENSATION FOR SUBSTRATE DOPING IN EDGE RECONSTRUCTION FOR IN-SIT...
Publication number
20210379723
Publication date
Dec 9, 2021
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
USING A TRAINED NEURAL NETWORK FOR USE IN IN-SITU MONITORING DURING...
Publication number
20210358819
Publication date
Nov 18, 2021
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...
Publication number
20210354265
Publication date
Nov 18, 2021
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
POLISHING APPARATUS USING NEURAL NETWORK FOR MONITORING
Publication number
20210229234
Publication date
Jul 29, 2021
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
COMPENSATION FOR SUBSTRATE DOPING FOR IN-SITU ELECTROMAGNETIC INDUC...
Publication number
20190389028
Publication date
Dec 26, 2019
Wei Lu
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD...
Publication number
20190299356
Publication date
Oct 3, 2019
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
Chattering Correction for Accurate Sensor Position Determination on...
Publication number
20190084119
Publication date
Mar 21, 2019
Harry Q. Lee
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS USING NEURAL NETWORK FOR MONITORING
Publication number
20180304435
Publication date
Oct 25, 2018
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
Display of Spectra Contour Plots Versus Time For Semiconductor Proc...
Publication number
20180113440
Publication date
Apr 26, 2018
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Application
MONITORING OF POLISHING PAD THICKNESS FOR CHEMICAL MECHANICAL POLIS...
Publication number
20180056476
Publication date
Mar 1, 2018
Applied Materials, Inc.
Jimin Zhang
G01 - MEASURING TESTING
Information
Patent Application
POLISHING APPARATUS HAVING OPTICAL MONITORING OF SUBSTRATES FOR UNI...
Publication number
20170100814
Publication date
Apr 13, 2017
Applied Materials, Inc.
Jun Qian
B24 - GRINDING POLISHING
Information
Patent Application
Limiting Adjustment of Polishing Rates During Substrate Polishing
Publication number
20160372388
Publication date
Dec 22, 2016
Applied Materials, Inc.
Dominic J. Benvegnu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dynamically Tracking Spectrum Features For Endpoint Detection
Publication number
20160129550
Publication date
May 12, 2016
Applied Materials, Inc.
Jeffrey Drue David
G01 - MEASURING TESTING
Information
Patent Application
Multi-Platen Multi-Head Polishing Architecture
Publication number
20160101497
Publication date
Apr 14, 2016
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Information
Patent Application
ENDPOINT METHOD USING PEAK LOCATION OF SPECTRA CONTOUR PLOTS VERSUS...
Publication number
20150160649
Publication date
Jun 11, 2015
Applied Materials, Inc.
Jeffrey Drue David
G05 - CONTROLLING REGULATING
Information
Patent Application
Adjustment of Polishing Rates During Substrate Polishing With Predi...
Publication number
20150147940
Publication date
May 28, 2015
Applied Materials, Inc.
Dominic J. Benvegnu
G01 - MEASURING TESTING