Hartmut Brandenburg

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Westhausen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing an optical system
- Patent number 7,133,225
- Issue date Nov 7, 2006
- Carl Zeiss SMT AG
- Rolf Freimann
- G02 - OPTICS
Information Patent Grant
Objective, particularly a projection objective for use in semicondu...
- Patent number 7,123,427
- Issue date Oct 17, 2006
- Carl Zeiss SMT AG
- Alexander Kohl
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Optical measuring system, and a projection objective
- Publication number 20080100930
- Publication date May 1, 2008
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS
Information Patent Application
Method of qualifying a diffraction grating and method of manufactur...
- Publication number 20060274325
- Publication date Dec 7, 2006
- Carl Zeiss SMT AG
- Jochen Hetzler
- G02 - OPTICS
Information Patent Application
Optical measuring system, and a projection objective
- Publication number 20040257675
- Publication date Dec 23, 2004
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS
Information Patent Application
Objective, particularly a projection objective for use in semicondu...
- Publication number 20040201909
- Publication date Oct 14, 2004
- Alexander Kohl
- G02 - OPTICS