Haruhiko Kusunose

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Mask inspection method and mask inspection apparatus
- Patent number 12,050,184
- Issue date Jul 30, 2024
- Lasertec Corporation
- Keita Saito
- G01 - MEASURING TESTING
Information Patent Grant
Optical device, and method for preventing contamination of optical...
- Patent number 11,353,802
- Issue date Jun 7, 2022
- Lasertec Corporation
- Haruhiko Kusunose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection device and inspection method
- Patent number 10,712,287
- Issue date Jul 14, 2020
- Lasertec Corporation
- Masayasu Nishizawa
- G01 - MEASURING TESTING
Information Patent Grant
Correction method, correction apparatus, and inspection apparatus
- Patent number 10,706,527
- Issue date Jul 7, 2020
- Lasertec Corporation
- Tsunehito Kohyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical apparatus and vibration removing method
- Patent number 10,645,289
- Issue date May 5, 2020
- Lasertec Corporation
- Haruhiko Kusunose
- G02 - OPTICS
Information Patent Grant
Interferometer and phase shift amount measuring apparatus with diff...
- Patent number 9,719,859
- Issue date Aug 1, 2017
- LASERTEC CORPORATION
- Haruhiko Kusunose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Defect coordinates measurement device, defect coordinates measureme...
- Patent number 9,638,739
- Issue date May 2, 2017
- Lasertec Corporation
- Haruhiko Kusunose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle inspection apparatus
- Patent number 9,588,421
- Issue date Mar 7, 2017
- Lasertec Corporation
- Kiwamu Takehisa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chucking device and chucking method
- Patent number 9,117,869
- Issue date Aug 25, 2015
- Lasertec Corporation
- Haruhiko Kusunose
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Microscope and inspection apparatus
- Patent number 9,013,787
- Issue date Apr 21, 2015
- Lasertec Corporation
- Haruhiko Kusunose
- G01 - MEASURING TESTING
Information Patent Grant
Substrate inspection apparatus and mask inspection apparatus
- Patent number 8,760,642
- Issue date Jun 24, 2014
- Lasertec Corporation
- Zenta Hori
- G01 - MEASURING TESTING
Information Patent Grant
Light source apparatus
- Patent number 8,305,681
- Issue date Nov 6, 2012
- Lasertec Corporation
- Jun Sakuma
- G02 - OPTICS
Information Patent Grant
Depth measurement apparatus and depth measurement method
- Patent number 8,069,008
- Issue date Nov 29, 2011
- Lasertec Corporation
- Haruhiko Kusunose
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus and method, and production method for pattern...
- Patent number 7,907,270
- Issue date Mar 15, 2011
- Lasertec Corporation
- Haruhiko Kusunose
- G01 - MEASURING TESTING
Information Patent Grant
Photomask inspection apparatus
- Patent number 7,796,343
- Issue date Sep 14, 2010
- Lasertec Corporation
- Kiwamu Takehisa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination apparatus and illumination method
- Patent number 7,764,414
- Issue date Jul 27, 2010
- Lasertec Corporation
- Haruhiko Kusunose
- G02 - OPTICS
Information Patent Grant
Phase shift amount measurement apparatus and transmittance measurem...
- Patent number 7,643,157
- Issue date Jan 5, 2010
- Lasertec Corporation
- Hideo Takizawa
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus, inspection method, and manufacturing method o...
- Patent number 7,548,309
- Issue date Jun 16, 2009
- Lasertec Corporation
- Haruhiko Kusunose
- G01 - MEASURING TESTING
Information Patent Grant
Optically scanning apparatus and defect inspection system
- Patent number 6,858,859
- Issue date Feb 22, 2005
- Lasertec Corporation
- Haruhiko Kusunose
- G01 - MEASURING TESTING
Information Patent Grant
Light source device
- Patent number 6,665,326
- Issue date Dec 16, 2003
- Lasertec Corporation
- Haruhiko Kusunose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image pickup apparatus and defect inspection apparatus for photomask
- Patent number 6,654,110
- Issue date Nov 25, 2003
- Lasertec Corporation
- Makoto Yonezawa
- G01 - MEASURING TESTING
Information Patent Grant
Laser microscope and a pattern inspection apparatus using such lase...
- Patent number 6,195,202
- Issue date Feb 27, 2001
- Lasertec Corporation
- Haruhiko Kusunose
- G02 - OPTICS
Information Patent Grant
Laser microscope and a pattern inspection apparatus using such lase...
- Patent number 6,043,932
- Issue date Mar 28, 2000
- Lasertec Corporation
- Haruhiko Kusunose
- G02 - OPTICS
Information Patent Grant
Mach-zehnder type interferometer
- Patent number 5,771,097
- Issue date Jun 23, 1998
- Lasertec Corporation
- Haruhiko Kusunose
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PHOTODETECTOR
- Publication number 20240402592
- Publication date Dec 5, 2024
- Lasertec Corporation
- Keita SAITO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL APPARATUS AND METHOD OF PREVENTING CONTAMINATION OF OPTICAL...
- Publication number 20240361590
- Publication date Oct 31, 2024
- Lasertec Corporation
- Ko GONDAIRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION APPARATUS AND ILLUMINATION METHOD
- Publication number 20240302670
- Publication date Sep 12, 2024
- Lasertec Corporation
- Keitaro HAYASHIDA
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
MASK INSPECTION METHOD AND MASK INSPECTION APPARATUS
- Publication number 20220178847
- Publication date Jun 9, 2022
- Lasertec Corporation
- Keita SAITO
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL DEVICE, AND METHOD FOR PREVENTING CONTAMINATION OF OPTICAL...
- Publication number 20210373447
- Publication date Dec 2, 2021
- Lasertec Corporation
- Haruhiko KUSUNOSE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
- Publication number 20210247323
- Publication date Aug 12, 2021
- Lasertec Corporation
- Kiwamu TAKEHISA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
- Publication number 20190277772
- Publication date Sep 12, 2019
- Lasertec Corporation
- Masayasu NISHIZAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CORRECTION METHOD, CORRECTION APPARATUS, AND INSPECTION APPARATUS
- Publication number 20180276812
- Publication date Sep 27, 2018
- Lasertec Corporation
- Tsunehito KOHYAMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL APPARATUS AND VIBRATION REMOVING METHOD
- Publication number 20180191958
- Publication date Jul 5, 2018
- Lasertec Corporation
- Haruhiko KUSUNOSE
- G02 - OPTICS
Information Patent Application
PELLICLE INSPECTION APPARATUS
- Publication number 20150293460
- Publication date Oct 15, 2015
- Lasertec Corporation
- Kiwamu TAKEHISA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTERFEROMETER AND PHASE SHIFT AMOUNT MEASURING APPARATUS
- Publication number 20150204729
- Publication date Jul 23, 2015
- Lasertec Corporation
- Haruhiko KUSUNOSE
- G01 - MEASURING TESTING
Information Patent Application
CHUCKING DEVICE AND CHUCKING METHOD
- Publication number 20140189998
- Publication date Jul 10, 2014
- Lasertec Corporation
- Haruhiko KUSUNOSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT COORDINATES MEASUREMENT DEVICE, DEFECT COORDINATES MEASUREME...
- Publication number 20130245971
- Publication date Sep 19, 2013
- Lasertec Corporation
- Haruhiko KUSUNOSE
- G01 - MEASURING TESTING
Information Patent Application
PLASMA SHIELD DEVICE AND PLASMA SOURCE APPARATUS
- Publication number 20130234597
- Publication date Sep 12, 2013
- Lasertec Corporation
- Haruhiko KUSUNOSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSCOPE AND INSPECTION APPARATUS
- Publication number 20130188251
- Publication date Jul 25, 2013
- Lasertec Corporation
- Haruhiko KUSUNOSE
- G02 - OPTICS
Information Patent Application
SUBSTRATE INSPECTION APPARATUS AND MASK INSPECTION APPARATUS
- Publication number 20120287424
- Publication date Nov 15, 2012
- LASERTEC CORPORATION
- Zenta HORI
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM AND INSPECTION METHOD
- Publication number 20110242312
- Publication date Oct 6, 2011
- Lasertec Corporation
- Hirokazu SEKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LIGHT SOURCE APPARATUS
- Publication number 20110220815
- Publication date Sep 15, 2011
- Lasertec Corporation
- Jun SAKUMA
- G02 - OPTICS
Information Patent Application
Depth measurement apparatus and depth measurement method
- Publication number 20090187378
- Publication date Jul 23, 2009
- Lasertec Corporation
- Haruhiko Kusunose
- G01 - MEASURING TESTING
Information Patent Application
PHOTOMASK INSPECTION APPARATUS
- Publication number 20090168191
- Publication date Jul 2, 2009
- Lasertec Corporation
- Kiwamu Takehisa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSPECTION APPARATUS, INSPECTION METHOD, AND MANUFACTURING METHOD O...
- Publication number 20080192238
- Publication date Aug 14, 2008
- Lasertec Corporation
- Haruhiko KUSUNOSE
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS AND METHOD, AND PRODUCTION METHOD FOR PATTERN...
- Publication number 20080186476
- Publication date Aug 7, 2008
- Lasertec Corporation
- Haruhiko Kusunose
- G01 - MEASURING TESTING
Information Patent Application
Phase shift amount measurement apparatus and transmittance measurem...
- Publication number 20080174786
- Publication date Jul 24, 2008
- Hideo Takizawa
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION APPARATUS AND ILLUMINATION METHOD
- Publication number 20080144148
- Publication date Jun 19, 2008
- Lasertec Corporation
- Haruhiko Kusunose
- G02 - OPTICS
Information Patent Application
IMAGE PICKUP APPARATUS AND DEFECT INSPECTION APPARATUS FOR PHOTOMASK
- Publication number 20030189703
- Publication date Oct 9, 2003
- Lasertec Corporation
- Makoto Yonezawa
- G01 - MEASURING TESTING
Information Patent Application
Optically scanning apparatus and defect inspection system
- Publication number 20020162979
- Publication date Nov 7, 2002
- LASERTEC CORPORATION
- Haruhiko Kusunose
- G01 - MEASURING TESTING
Information Patent Application
Light source device
- Publication number 20020080834
- Publication date Jun 27, 2002
- LASERTEC CORPORATION
- Haruhiko Kusunose
- B82 - NANO-TECHNOLOGY

Haruhiko Kusunose

Person

Patents Grantslast 30 patents

Mask inspection method and mask inspection apparatus

Optical device, and method for preventing contamination of optical...

Inspection device and inspection method

Correction method, correction apparatus, and inspection apparatus

Optical apparatus and vibration removing method

Interferometer and phase shift amount measuring apparatus with diff...

Defect coordinates measurement device, defect coordinates measureme...

Pellicle inspection apparatus

Chucking device and chucking method

Microscope and inspection apparatus

Substrate inspection apparatus and mask inspection apparatus

Light source apparatus

Depth measurement apparatus and depth measurement method

Inspection apparatus and method, and production method for pattern...

Photomask inspection apparatus

Illumination apparatus and illumination method

Phase shift amount measurement apparatus and transmittance measurem...

Inspection apparatus, inspection method, and manufacturing method o...

Optically scanning apparatus and defect inspection system

Light source device

Image pickup apparatus and defect inspection apparatus for photomask

Laser microscope and a pattern inspection apparatus using such lase...

Laser microscope and a pattern inspection apparatus using such lase...

Mach-zehnder type interferometer

Patents Applicationslast 30 patents

PHOTODETECTOR

OPTICAL APPARATUS AND METHOD OF PREVENTING CONTAMINATION OF OPTICAL...

ILLUMINATION APPARATUS AND ILLUMINATION METHOD

MASK INSPECTION METHOD AND MASK INSPECTION APPARATUS

OPTICAL DEVICE, AND METHOD FOR PREVENTING CONTAMINATION OF OPTICAL...

INSPECTION DEVICE AND INSPECTION METHOD

INSPECTION DEVICE AND INSPECTION METHOD

CORRECTION METHOD, CORRECTION APPARATUS, AND INSPECTION APPARATUS

OPTICAL APPARATUS AND VIBRATION REMOVING METHOD

PELLICLE INSPECTION APPARATUS

INTERFEROMETER AND PHASE SHIFT AMOUNT MEASURING APPARATUS

CHUCKING DEVICE AND CHUCKING METHOD

DEFECT COORDINATES MEASUREMENT DEVICE, DEFECT COORDINATES MEASUREME...

PLASMA SHIELD DEVICE AND PLASMA SOURCE APPARATUS

MICROSCOPE AND INSPECTION APPARATUS

SUBSTRATE INSPECTION APPARATUS AND MASK INSPECTION APPARATUS

INSPECTION SYSTEM AND INSPECTION METHOD

LIGHT SOURCE APPARATUS

Depth measurement apparatus and depth measurement method

PHOTOMASK INSPECTION APPARATUS

INSPECTION APPARATUS, INSPECTION METHOD, AND MANUFACTURING METHOD O...

INSPECTION APPARATUS AND METHOD, AND PRODUCTION METHOD FOR PATTERN...

Phase shift amount measurement apparatus and transmittance measurem...

ILLUMINATION APPARATUS AND ILLUMINATION METHOD

IMAGE PICKUP APPARATUS AND DEFECT INSPECTION APPARATUS FOR PHOTOMASK

Optically scanning apparatus and defect inspection system

Light source device