TREA

Haruhiro H. Goto

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  • Sendai, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 5,728,278
    • Issue date Mar 17, 1998
    • Canon Kabushiki Kaisha/Applied Materials Japan Inc.
    • Nobuyuki Okamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 5,316,645
    • Issue date May 31, 1994
    • Canon Kabushiki Kaisha
    • Atsushi Yamagami
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...