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Haruhisa Takahata
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Naka, JP
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last 30 patents
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Patent Grant
Environmental scanning electron microcope
Patent number
7,365,323
Issue date
Apr 29, 2008
Hitachi High-Technologies Corporation
Tomohisa Ohtaki
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Environmental scanning electron microscope
Publication number
20060219912
Publication date
Oct 5, 2006
Hitachi High-Technologies Corporation
Tomohisa Ohtaki
G01 - MEASURING TESTING