Haruka SUZUKI

Follow

Person

Nagoya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma generation apparatus
- Patent number 11,152,193
- Issue date Oct 19, 2021
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Hirotaka Toyoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave supply apparatus, plasma processing apparatus, and plasma...
- Patent number 9,852,892
- Issue date Dec 26, 2017
- Tokyo Electron Limited
- Hitoshi Itoh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA GENERATION APPARATUS
- Publication number 20200335308
- Publication date Oct 22, 2020
- National University Corporation Tokai National Higher Education and Research...
- Hirotaka TOYODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE SUPPLY APPARATUS, PLASMA PROCESSING APPARATUS, AND PLASMA...
- Publication number 20170365446
- Publication date Dec 21, 2017
- TOKYO ELECTRON LIMITED
- Hitoshi ITOH
- H01 - BASIC ELECTRIC ELEMENTS