Haruki ARITA

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Particle beam system and pattern data generation method for particl...
- Patent number 9,215,791
- Issue date Dec 15, 2015
- Hitachi, Ltd.
- Haruki Arita
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
PARTICLE BEAM SYSTEM AND PATTERN DATA GENERATION METHOD FOR PARTICL...
- Publication number 20140152199
- Publication date Jun 5, 2014
- Hitachi, Ltd
- Haruki ARITA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR