Haruko Ohno

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for etching ruthenium films
- Patent number 6,776,919
- Issue date Aug 17, 2004
- Ebara Corporation
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of and apparatus for cleaning substrate
- Patent number 6,745,784
- Issue date Jun 8, 2004
- Ebara Corporation
- Ichiro Katakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for cleaning substrate
- Patent number 6,558,478
- Issue date May 6, 2003
- Ebara Corporation
- Ichiro Katakabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method of and apparatus for cleaning substrate
- Publication number 20030168089
- Publication date Sep 11, 2003
- Ichiro Katakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method
- Publication number 20030092264
- Publication date May 15, 2003
- Shinji Kajita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for etching ruthenium films
- Publication number 20020060202
- Publication date May 23, 2002
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...