Haruko ONO

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for cleaning substrate
- Patent number 9,089,881
- Issue date Jul 28, 2015
- Ebara Corporation
- Xinming Wang
- B08 - CLEANING
Information Patent Grant
Apparatus for and method of processing substrate
- Patent number 7,578,887
- Issue date Aug 25, 2009
- Ebara Corporation
- Shinji Kajita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 7,309,449
- Issue date Dec 18, 2007
- Ebara Corporation
- Haruko Ono
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CLEANING SUBSTRATE
- Publication number 20150287617
- Publication date Oct 8, 2015
- EBARA CORPORATION
- Xinming WANG
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR CLEANING SUBSTRATE
- Publication number 20110209727
- Publication date Sep 1, 2011
- Xinming WANG
- B08 - CLEANING
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20070224811
- Publication date Sep 27, 2007
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method
- Publication number 20040226915
- Publication date Nov 18, 2004
- Haruko Ono
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20040219298
- Publication date Nov 4, 2004
- Akira Fukunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for and method of processing substrate
- Publication number 20040211959
- Publication date Oct 28, 2004
- Shinji Kajita
- H01 - BASIC ELECTRIC ELEMENTS