Harumi Hayakawa

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Wako-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Solvent developable negative resist composition, resist pattern for...
- Patent number 9,134,617
- Issue date Sep 15, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Senzaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for producing substrate having surface nanostructure
- Patent number 9,060,415
- Issue date Jun 16, 2015
- Riken
- Shigenori Fujikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Primer and pattern forming method for layer including block copolymer
- Patent number 8,999,631
- Issue date Apr 7, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Senzaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method of forming fine pattern, and developer
- Patent number 8,961,802
- Issue date Feb 24, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Shigenori Fujikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Primer and pattern forming method for layer including block copolymer
- Patent number 8,956,810
- Issue date Feb 17, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Senzaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Patents Applicationslast 30 patents

Information Patent Application
FILM DEPOSITION METHOD, METHOD FOR MANUFACTURING DEVICE, AND FILM D...
- Publication number 20250044699
- Publication date Feb 6, 2025
- Riken
- Harumi Hayakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION FOR NEGATIVE DEVELOPMENT WHICH IS USED FOR FORMA...
- Publication number 20140127626
- Publication date May 8, 2014
- Riken
- Takahiro Senzaki
- B82 - NANO-TECHNOLOGY
Information Patent Application
SOLVENT DEVELOPABLE NEGATIVE RESIST COMPOSITION, RESIST PATTERN FOR...
- Publication number 20140113236
- Publication date Apr 24, 2014
- Riken
- Takahiro Senzaki
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF FORMING FINE PATTERN, AND DEVELOPER
- Publication number 20140054265
- Publication date Feb 27, 2014
- Tokyo Ohka Kogyo Co., Ltd.
- Shigenori Fujikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRIMER AND PATTERN FORMING METHOD FOR LAYER INCLUDING BLOCK COPOLYMER
- Publication number 20140030652
- Publication date Jan 30, 2014
- Riken
- Takahiro Senzaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD FOR PRODUCING SUBSTRATE HAVING SURFACE NANOSTRUCTURE
- Publication number 20130313223
- Publication date Nov 28, 2013
- Tokyo Ohka Kogyo Co., Ltd.
- Shigenori Fujikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY