Haruna Kawashima

Person

Tochigi-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Light source apparatus, illumination device, exposure apparatus, an...
- Patent number 10,216,092
- Issue date Feb 26, 2019
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source apparatus, illumination device, exposure apparatus, an...
- Patent number 9,772,560
- Issue date Sep 26, 2017
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion exposure apparatus and device manufacturing method
- Patent number 8,164,754
- Issue date Apr 24, 2012
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 8,077,288
- Issue date Dec 13, 2011
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 7,880,862
- Issue date Feb 1, 2011
- Canon Kabushiki Kaisha
- Nobuyuki Saito
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,630,058
- Issue date Dec 8, 2009
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method
- Patent number 7,619,716
- Issue date Nov 17, 2009
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 7,525,656
- Issue date Apr 28, 2009
- Canon Kabushiki Kaisha
- Ayako Kadono
- G01 - MEASURING TESTING
Information Patent Grant
Exposure method and apparatus
- Patent number 7,145,635
- Issue date Dec 5, 2006
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system
- Patent number 7,057,820
- Issue date Jun 6, 2006
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G02 - OPTICS
Information Patent Grant
Illumination system with plural light sources, and exposure apparat...
- Patent number 6,727,982
- Issue date Apr 27, 2004
- Canon Kabushiki Kaisha
- Haruna Kawashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning exposure apparatus with surface position detecting system
- Patent number 6,023,320
- Issue date Feb 8, 2000
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detection device
- Patent number 5,955,739
- Issue date Sep 21, 1999
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus using the same
- Patent number 5,751,428
- Issue date May 12, 1998
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting method and apparatus including detection...
- Patent number 5,602,400
- Issue date Feb 11, 1997
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 5,489,966
- Issue date Feb 6, 1996
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting device
- Patent number 5,414,515
- Issue date May 9, 1995
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focusing method
- Patent number 5,323,016
- Issue date Jun 21, 1994
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for optically detecting inclination of a surface
- Patent number 5,218,415
- Issue date Jun 8, 1993
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for detecting the position of a surface
- Patent number 5,162,642
- Issue date Nov 10, 1992
- Canon Kabushiki Kaisha
- Takahiro Akamatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting method at a predetermined and plurality...
- Patent number 5,124,562
- Issue date Jun 23, 1992
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for precisely detecting surface position of a...
- Patent number 5,118,957
- Issue date Jun 2, 1992
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 5,117,254
- Issue date May 26, 1992
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Autofocusing system for a projecting exposure apparatus
- Patent number 4,952,970
- Issue date Aug 28, 1990
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LIGHT SOURCE APPARATUS, ILLUMINATION DEVICE, EXPOSURE APPARATUS, AN...
- Publication number 20170123321
- Publication date May 4, 2017
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G02 - OPTICS
Information Patent Application
LIGHT SOURCE APPARATUS, ILLUMINATION DEVICE, EXPOSURE APPARATUS, AN...
- Publication number 20160041472
- Publication date Feb 11, 2016
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20100002209
- Publication date Jan 7, 2010
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090268176
- Publication date Oct 29, 2009
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090033904
- Publication date Feb 5, 2009
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20080151251
- Publication date Jun 26, 2008
- Canon Kabushiki Kaisha
- Nobuyuki Saito
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE METHOD
- Publication number 20070132981
- Publication date Jun 14, 2007
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20070046922
- Publication date Mar 1, 2007
- Ayako KADONO
- G01 - MEASURING TESTING
Information Patent Application
Exposure method and apparatus
- Publication number 20050151942
- Publication date Jul 14, 2005
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination system with plural light sources, and exposure apparat...
- Publication number 20020036904
- Publication date Mar 28, 2002
- Haruna Kawashima
- H01 - BASIC ELECTRIC ELEMENTS

Haruna Kawashima

Person

Patents Grantslast 30 patents

Light source apparatus, illumination device, exposure apparatus, an...

Light source apparatus, illumination device, exposure apparatus, an...

Immersion exposure apparatus and device manufacturing method

Exposure apparatus

Exposure apparatus and device fabrication method

Exposure apparatus and device manufacturing method

Exposure method

Exposure apparatus and device fabrication method

Exposure method and apparatus

Projection optical system

Illumination system with plural light sources, and exposure apparat...

Scanning exposure apparatus with surface position detecting system

Surface position detection device

Exposure method and exposure apparatus using the same

Surface position detecting method and apparatus including detection...

Projection exposure apparatus

Surface position detecting device

Focusing method

Device for optically detecting inclination of a surface

Device for detecting the position of a surface

Surface position detecting method at a predetermined and plurality...

Method and apparatus for precisely detecting surface position of a...

Projection exposure apparatus

Autofocusing system for a projecting exposure apparatus

Patents Applicationslast 30 patents

LIGHT SOURCE APPARATUS, ILLUMINATION DEVICE, EXPOSURE APPARATUS, AN...

LIGHT SOURCE APPARATUS, ILLUMINATION DEVICE, EXPOSURE APPARATUS, AN...

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

IMMERSION EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

EXPOSURE METHOD

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

Exposure method and apparatus

Illumination system with plural light sources, and exposure apparat...