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Tokyo, JP
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last 30 patents
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Patent Grant
Multi-charged beam lens, charged-particle beam exposure apparatus u...
Patent number
6,946,662
Issue date
Sep 20, 2005
Canon Kabushiki Kaisha
Haruhito Ono
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Multi-charged beam lens, charged-particle beam exposure apparatus u...
Publication number
20040061064
Publication date
Apr 1, 2004
Canon Kabushiki Kaisha
Haruhito Ono
B82 - NANO-TECHNOLOGY
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Patent Application
Electron beam exposure apparatus, device for shaping a beam of char...
Publication number
20020027204
Publication date
Mar 7, 2002
Advantest Corporation
Harunobu Muto
B82 - NANO-TECHNOLOGY