Harunobu Sakuma

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,587,313
- Issue date Mar 7, 2017
- Hitachi Kokusai Electric Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing semiconductor device, method of manufac...
- Patent number 9,190,299
- Issue date Nov 17, 2015
- Hitachi Kokusai Electric, Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and semiconductor devices manufactur...
- Patent number 8,222,161
- Issue date Jul 17, 2012
- Hitachi Kokusai Electric Inc.
- Yoshihiko Yanagisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and semiconductor devices manufactur...
- Patent number 7,943,528
- Issue date May 17, 2011
- Hitachi Kokusai Electric Inc.
- Yoshihiko Yanagisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,875,280
- Issue date Apr 5, 2005
- Hitachi Kokusai Electric Inc.
- Kazuhito Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20160013053
- Publication date Jan 14, 2016
- Hitachi Kokusai Electric Inc.
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20150132972
- Publication date May 14, 2015
- Hitachi Kokusai Electric Inc.
- Yuichi WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Device, Method for Manufacturing Semiconductor...
- Publication number 20140302687
- Publication date Oct 9, 2014
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Manufacturing Semiconductor Device, Method of Manufac...
- Publication number 20140256160
- Publication date Sep 11, 2014
- Hitachi Kokusai Electric Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, APPARATUS FOR MANUFAC...
- Publication number 20140235068
- Publication date Aug 21, 2014
- Hitachi Kokusai Electric Inc.
- Hiroshi ASHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICES MANUFACTUR...
- Publication number 20110192347
- Publication date Aug 11, 2011
- Hitachi Kokusai Electric Inc.
- Yoshihiko YANAGISAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICES MANUFACTUR...
- Publication number 20110053382
- Publication date Mar 3, 2011
- Hitachi Kokusai Electric Inc.
- Yoshihiko YANAGISAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus
- Publication number 20030140853
- Publication date Jul 31, 2003
- Hitachi Kokusai Electric Inc.
- Tetsuya Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor treating apparatus and cleaning method of the same
- Publication number 20030037802
- Publication date Feb 27, 2003
- Hitachi, Ltd
- Miwako Nakahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20010025600
- Publication date Oct 4, 2001
- Kazuhito Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Harunobu Sakuma

Person

Patents Grantslast 30 patents

Substrate processing apparatus, method of manufacturing semiconduct...

Apparatus for manufacturing semiconductor device, method of manufac...

Substrate processing apparatus and semiconductor devices manufactur...

Substrate processing apparatus and semiconductor devices manufactur...

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

Method of Manufacturing Semiconductor Device, Substrate Processing...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Device, Method for Manufacturing Semiconductor...

Apparatus for Manufacturing Semiconductor Device, Method of Manufac...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, APPARATUS FOR MANUFAC...

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICES MANUFACTUR...

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICES MANUFACTUR...

Substrate processing apparatus

Semiconductor treating apparatus and cleaning method of the same

Substrate processing apparatus and substrate processing method