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Harunori Ushikawa

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  • Shizuoka, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD FOR THE FORMATION OF CO FILM AND METHOD FOR THE FORMATION OF...
    • Publication number 20130023116
    • Publication date Jan 24, 2013
    • Ulvac, Inc.
    • Shoichiro Kumamoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING NI FILM
    • Publication number 20120264310
    • Publication date Oct 18, 2012
    • Ulvac, Inc.
    • Toshimitsu Uehigashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING NISI FILM, METHOD FOR FORMING SILICIDE FILM, MET...
    • Publication number 20120244701
    • Publication date Sep 27, 2012
    • Ulvac, Inc.
    • Yasushi Higuchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING TANTALUM NITRIDE FILM AND FILM-FORMING APPARATUS...
    • Publication number 20110318505
    • Publication date Dec 29, 2011
    • Akiko Yamamoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING CU ELECTRICAL INTERCONNECTION FILM
    • Publication number 20110104890
    • Publication date May 5, 2011
    • Ulvac, Inc.
    • Shoichiro Kumamoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for Forming Tantalum Nitride Film
    • Publication number 20100206716
    • Publication date Aug 19, 2010
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PURGE GAS ASSEMBLY
    • Publication number 20100139556
    • Publication date Jun 10, 2010
    • Tsuyoshi Kagami
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING TANTALUM NITRIDE FILM
    • Publication number 20090246375
    • Publication date Oct 1, 2009
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for Forming Tantalum Nitride Film
    • Publication number 20090159430
    • Publication date Jun 25, 2009
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for Forming Tantalum Nitride Film
    • Publication number 20090162565
    • Publication date Jun 25, 2009
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for Forming Tantalum Nitride Film
    • Publication number 20090159431
    • Publication date Jun 25, 2009
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for Forming Tantalum Nitride Film
    • Publication number 20090104775
    • Publication date Apr 23, 2009
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for Forming Cu Film
    • Publication number 20090078580
    • Publication date Mar 26, 2009
    • ULVAC, Inc.
    • Tomoyuki Yoshihama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method for Forming Tantalum Nitride Film
    • Publication number 20080199601
    • Publication date Aug 21, 2008
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...