Haruo Kokubo

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Patents Grantslast 30 patents

Information Patent Grant
Methods of manufacturing phase shift masks having etched substrate...
- Patent number 7,056,624
- Issue date Jun 6, 2006
- Dai Nippon Printing Co., Ltd.
- Haruo Kokubo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Halftone phase shift photomask and blanks for halftone phase shift...
- Patent number 6,764,792
- Issue date Jul 20, 2004
- Dai Nippon Printing Co., Ltd.
- Junji Fujikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase-shift photomask manufacturing method and phase-shift photomask
- Patent number 6,627,359
- Issue date Sep 30, 2003
- Dai Nippon Printing Co., Ltd.
- Haruo Kokubo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Method of manufacturing phase shift mask and phase shift mask
- Publication number 20040023129
- Publication date Feb 5, 2004
- Haruo Kokubo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Phase-shift photomask manufacturing method and phase-shift photomask
- Publication number 20010044056
- Publication date Nov 22, 2001
- Haruo Kokubo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY