Haruo Morikawa

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Toyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Reaction tube structure and substrate processing apparatus
- Patent number 11,359,283
- Issue date Jun 14, 2022
- Kokusai Electric Corporation
- Tetsuya Marubayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and film forming method
- Patent number 8,507,296
- Issue date Aug 13, 2013
- Hitachi Kokusai Electric Inc.
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,501,599
- Issue date Aug 6, 2013
- Hitachi Kokusai Electric Inc.
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20240249960
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Kazuya NABETA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION TUBE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180142353
- Publication date May 24, 2018
- Hitachi Kokusai Electric Inc.
- Tetsuya MARUBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method and film forming method
- Publication number 20090197352
- Publication date Aug 6, 2009
- Hitachi Kokusai Electric Inc.
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Substrate Processing Method
- Publication number 20090029486
- Publication date Jan 29, 2009
- Hitachi Kokusai Electric Inc.
- Masaaki Ueno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...