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Haruo Nakase
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Shiga, JP
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Patents Grants
last 30 patents
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Patent Grant
Clean room and method for fabricating semiconductor device
Patent number
6,616,526
Issue date
Sep 9, 2003
Matsushita Electric Industrial Co., Ltd.
Takahiro Matsuura
F24 - HEATING RANGES VENTILATING
Patents Applications
last 30 patents
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Patent Application
Clean room and method for fabricating semiconductor device
Publication number
20020081962
Publication date
Jun 27, 2002
Takahiro Matsuura
F24 - HEATING RANGES VENTILATING