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Haruo Ozawa
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Tokyo, JP
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last 30 patents
Information
Patent Grant
Projection exposure apparatus
Patent number
6,341,006
Issue date
Jan 22, 2002
Nikon Corporation
Masayuki Murayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optical apparatus
Patent number
4,939,630
Issue date
Jul 3, 1990
Nikon Corporation
Tetsuo Kikuchi
G02 - OPTICS
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Patent Grant
Method and apparatus for correcting rotational errors during inspec...
Patent number
4,737,920
Issue date
Apr 12, 1988
Nippon Kogaku K.K.
Haruo Ozawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY