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Haruo Takahashi
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Kanagawa-ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Optical film thickness controlling method, optical film thickness c...
Patent number
7,927,472
Issue date
Apr 19, 2011
ULVAC, Inc.
Haruo Takahashi
G01 - MEASURING TESTING
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Patent Grant
Optical film thickness controlling method and apparatus, dielectric...
Patent number
7,247,345
Issue date
Jul 24, 2007
ULVAC, Inc.
Haruo Takahashi
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Optical film thickness controlling method, optical film thickness c...
Publication number
20080011229
Publication date
Jan 17, 2008
ULVAC, Inc.
Haruo Takahashi
G02 - OPTICS
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Patent Application
Optical film thickness controlling method, optical film thickness c...
Publication number
20040008435
Publication date
Jan 15, 2004
Haruo Takahashi
G02 - OPTICS